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Paper Abstract and Keywords
Presentation 2011-11-24 14:25
TiO2-SiO2 ultra-low-expansion glasses for EUVL system evaluated by ultrasonic zero-CTE temperature measurement system
Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Yuko Maruyama (Tohoku Univ.) US2011-71
Abstract (in Japanese) (See Japanese page) 
(in English) We developed an indirect ultrasonic measurement method as a practical system for super-precisely measuring the zero-CTE temperatures, {T(zero-CTE)} of TiO2-SiO2 ultra-low-expansion (ULE) glasses. In this paper, we obtained relationships among T(zero-CTE), acoustic properties (leaky surface acoustic wave velocity, longitudinal velocity, shear velocity, and density), TiO2 concentration C(TiO2), fictive temperature (TF), and OH concentration C(OH) of TiO2-SiO2 ULE glass. We demonstrate that TiO2-SiO2 ULE glasses with T(zero-CTE) ranging from -74°C to 145°C will be available in C(TiO2) ranges of 6 to 9 wt%, TF ranges of 770 to 1110°C, and C(OH) ranges of 0 to 1000 wtppm.
Keyword (in Japanese) (See Japanese page) 
(in English) line-focus-beam ultrasonic material characterization system / velocity measurement / leaky surface acoustic waves / TiO2-SiO2 ultra-low-expansion glass / coefficient of thermal expansion / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 311, US2011-71, pp. 31-36, Nov. 2011.
Paper # US2011-71 
Date of Issue 2011-11-17 (US) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2011-11-24 - 2011-11-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokai Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2011-11-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) TiO2-SiO2 ultra-low-expansion glasses for EUVL system evaluated by ultrasonic zero-CTE temperature measurement system 
Sub Title (in English)  
Keyword(1) line-focus-beam ultrasonic material characterization system  
Keyword(2) velocity measurement  
Keyword(3) leaky surface acoustic waves  
Keyword(4) TiO2-SiO2 ultra-low-expansion glass  
Keyword(5) coefficient of thermal expansion  
1st Author's Name Jun-ichi Kushibiki  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Mototaka Arakawa  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Yuji Ohashi  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Yuko Maruyama  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
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Date Time 2011-11-24 14:25:00 
Presentation Time 25 
Registration for US 
Paper # IEICE-US2011-71 
Volume (vol) IEICE-111 
Number (no) no.311 
Page pp.31-36 
#Pages IEICE-6 
Date of Issue IEICE-US-2011-11-17 

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