Paper Abstract and Keywords |
Presentation |
2011-10-26 13:00
Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target Takuya Yokomoto, Yosuke Maeda, Takumi Miyazawa, Tomohiko Yamakami, Katsuya Abe (SinshuUniv.) CPM2011-109 Link to ES Tech. Rep. Archives: CPM2011-109 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
CuAlO2 films were prepared by reactive magnetron sputtering using Al-Cu hybrid targets
and these structural properties were characterized.
The hybrid targets were some Cu plates placed on an Al target.
The the film grown at an Al area ratio (Al/(Al+Cu)) of 95% and
oxygen flow rate of 3 sccm had a near stoichiometic composition ratio.
From XRD measurements, the film structure was found to be amorphous. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
reactive sputtering / TCO / CuAlO2 / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 111, no. 264, CPM2011-109, pp. 1-4, Oct. 2011. |
Paper # |
CPM2011-109 |
Date of Issue |
2011-10-19 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2011-109 Link to ES Tech. Rep. Archives: CPM2011-109 |
Conference Information |
Committee |
CPM |
Conference Date |
2011-10-26 - 2011-10-27 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Fukui Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
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Paper Information |
Registration To |
CPM |
Conference Code |
2011-10-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target |
Sub Title (in English) |
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Keyword(1) |
reactive sputtering |
Keyword(2) |
TCO |
Keyword(3) |
CuAlO2 |
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1st Author's Name |
Takuya Yokomoto |
1st Author's Affiliation |
Sinshu University (SinshuUniv.) |
2nd Author's Name |
Yosuke Maeda |
2nd Author's Affiliation |
Sinshu University (SinshuUniv.) |
3rd Author's Name |
Takumi Miyazawa |
3rd Author's Affiliation |
Sinshu University (SinshuUniv.) |
4th Author's Name |
Tomohiko Yamakami |
4th Author's Affiliation |
Sinshu University (SinshuUniv.) |
5th Author's Name |
Katsuya Abe |
5th Author's Affiliation |
Sinshu University (SinshuUniv.) |
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Speaker |
Author-1 |
Date Time |
2011-10-26 13:00:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2011-109 |
Volume (vol) |
vol.111 |
Number (no) |
no.264 |
Page |
pp.1-4 |
#Pages |
4 |
Date of Issue |
2011-10-19 (CPM) |