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Paper Abstract and Keywords
Presentation 2011-10-26 13:00
Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target
Takuya Yokomoto, Yosuke Maeda, Takumi Miyazawa, Tomohiko Yamakami, Katsuya Abe (SinshuUniv.) CPM2011-109 Link to ES Tech. Rep. Archives: CPM2011-109
Abstract (in Japanese) (See Japanese page) 
(in English) CuAlO2 films were prepared by reactive magnetron sputtering using Al-Cu hybrid targets
and these structural properties were characterized.
The hybrid targets were some Cu plates placed on an Al target.
The the film grown at an Al area ratio (Al/(Al+Cu)) of 95% and
oxygen flow rate of 3 sccm had a near stoichiometic composition ratio.
From XRD measurements, the film structure was found to be amorphous.
Keyword (in Japanese) (See Japanese page) 
(in English) reactive sputtering / TCO / CuAlO2 / / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 264, CPM2011-109, pp. 1-4, Oct. 2011.
Paper # CPM2011-109 
Date of Issue 2011-10-19 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2011-109 Link to ES Tech. Rep. Archives: CPM2011-109

Conference Information
Committee CPM  
Conference Date 2011-10-26 - 2011-10-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Fukui Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2011-10-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target 
Sub Title (in English)  
Keyword(1) reactive sputtering  
Keyword(2) TCO  
Keyword(3) CuAlO2  
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1st Author's Name Takuya Yokomoto  
1st Author's Affiliation Sinshu University (SinshuUniv.)
2nd Author's Name Yosuke Maeda  
2nd Author's Affiliation Sinshu University (SinshuUniv.)
3rd Author's Name Takumi Miyazawa  
3rd Author's Affiliation Sinshu University (SinshuUniv.)
4th Author's Name Tomohiko Yamakami  
4th Author's Affiliation Sinshu University (SinshuUniv.)
5th Author's Name Katsuya Abe  
5th Author's Affiliation Sinshu University (SinshuUniv.)
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Speaker Author-1 
Date Time 2011-10-26 13:00:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2011-109 
Volume (vol) vol.111 
Number (no) no.264 
Page pp.1-4 
#Pages
Date of Issue 2011-10-19 (CPM) 


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