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| Presentation | 2011-10-12 15:40 Development of Nb multi-layer Advanced Fabrication Process for Large-scale SFQ Circuits Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka (ISTEC-SRL), Akira Fujimaki, Hiroyuki Akaike (Nagoya Uni.), Nobuyuki Yoshikawa (Yohohama National Uni.), Kazuyoshi Takagi, Naofumi Takagi (Kyoto Uni.)  SCE2011-18 Link to ES Tech. Rep. Archives: SCE2011-18 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have been developing a Nb multi-layer fabrication process for large-scale SFQ circuits. We have been evaluating both diagnostic chips and shift register chips to improve reliability of the fabrication process. The diagnostic chip was designed to evaluate the characteristics of the basic elements such as junctions, contacts, resisters, and wirings in addition to their defect evaluations. The shift register chip was designed to evaluate defects in real SFQ circuits and defects depending circuit size. We discuss a correlation of defects between the diagnostic chips and the shift register chips, and describe detail of the measurement results of the shift register chips to investigate the many possible causes of the problems and improving reliability in our fabrication process. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | SFQ circuit / Superconducting integrated circuit / Fabrication process / Multi-layer structure / Niobium / Shift register / / | |
| Reference Info. | IEICE Tech. Rep., vol. 111, no. 230, SCE2011-18, pp. 37-42, Oct. 2011. | |
| Paper # | SCE2011-18 | |
| Date of Issue | 2011-10-05 (SCE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SCE2011-18 Link to ES Tech. Rep. Archives: SCE2011-18 |
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| Conference Information | |
| Committee | SCE |
| Conference Date | 2011-10-12 - 2011-10-12 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Fundamental Technologies for Superconducting Electronics, etc. |
| Paper Information | |
| Registration To | SCE |
| Conference Code | 2011-10-SCE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Nb multi-layer Advanced Fabrication Process for Large-scale SFQ Circuits |
| Sub Title (in English) | |
| Keyword(1) | SFQ circuit |
| Keyword(2) | Superconducting integrated circuit |
| Keyword(3) | Fabrication process |
| Keyword(4) | Multi-layer structure |
| Keyword(5) | Niobium |
| Keyword(6) | Shift register |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shuichi Nagasawa |
| 1st Author's Affiliation | Superconductivity Research Laboratory (ISTEC-SRL) |
| 2nd Author's Name | Kenji Hinode |
| 2nd Author's Affiliation | Superconductivity Research Laboratory (ISTEC-SRL) |
| 3rd Author's Name | Tetsuro Satoh |
| 3rd Author's Affiliation | Superconductivity Research Laboratory (ISTEC-SRL) |
| 4th Author's Name | Mutsuo Hidaka |
| 4th Author's Affiliation | Superconductivity Research Laboratory (ISTEC-SRL) |
| 5th Author's Name | Akira Fujimaki |
| 5th Author's Affiliation | Nagoya University (Nagoya Uni.) |
| 6th Author's Name | Hiroyuki Akaike |
| 6th Author's Affiliation | Nagoya University (Nagoya Uni.) |
| 7th Author's Name | Nobuyuki Yoshikawa |
| 7th Author's Affiliation | Yokohama National University (Yohohama National Uni.) |
| 8th Author's Name | Kazuyoshi Takagi |
| 8th Author's Affiliation | kyoto University (Kyoto Uni.) |
| 9th Author's Name | Naofumi Takagi |
| 9th Author's Affiliation | kyoto University (Kyoto Uni.) |
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| Speaker | Author-1 |
| Date Time | 2011-10-12 15:40:00 |
| Presentation Time | 25 minutes |
| Registration for | SCE |
| Paper # | SCE2011-18 |
| Volume (vol) | vol.111 |
| Number (no) | no.230 |
| Page | pp.37-42 |
| #Pages | 6 |
| Date of Issue | 2011-10-05 (SCE) |
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