Paper Abstract and Keywords |
Presentation |
2011-07-29 15:45
Effects of surface pre-treatments for AlN sputtering and Al2O3 atomic layer depositions on GaAs(001) Masahiro Kudo, Hong-An Shih, Masashi Akabori, Toshi-kazu Suzuki (JAIST) ED2011-42 Link to ES Tech. Rep. Archives: ED2011-42 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 111, no. 167, ED2011-42, pp. 25-30, July 2011. |
Paper # |
ED2011-42 |
Date of Issue |
2011-07-22 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2011-42 Link to ES Tech. Rep. Archives: ED2011-42 |
Conference Information |
Committee |
ED |
Conference Date |
2011-07-29 - 2011-07-30 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Multimedia system center, Nagaoka Univ. of Tech. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
TFT (organic,oxide), Semiconductor process (surface, interface, reliability), etc. |
Paper Information |
Registration To |
ED |
Conference Code |
2011-07-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Effects of surface pre-treatments for AlN sputtering and Al2O3 atomic layer depositions on GaAs(001) |
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1st Author's Name |
Masahiro Kudo |
1st Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
2nd Author's Name |
Hong-An Shih |
2nd Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
3rd Author's Name |
Masashi Akabori |
3rd Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
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Toshi-kazu Suzuki |
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Japan Advanced Institute of Science and Technology (JAIST) |
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Speaker |
Author-1 |
Date Time |
2011-07-29 15:45:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2011-42 |
Volume (vol) |
vol.111 |
Number (no) |
no.167 |
Page |
pp.25-30 |
#Pages |
6 |
Date of Issue |
2011-07-22 (ED) |
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