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| Presentation | 2011-05-19 16:40 Growth of GaN and AlGaN on B-Ga2O3 (100) substrate Shun Ito, Kenichiro Takeda, Kengo Nagata, Hiroki Aoshima, Kosuke Takehara, Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama (Meijo Univ), Isamu Akasaki, Hiroshi Amano (Meijo Univ/Nagoya Univ)  ED2011-16 CPM2011-23 SDM2011-29 Link to ES Tech. Rep. Archives: ED2011-16 CPM2011-23 SDM2011-29 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | beta-Ga2O3 is one of the most attractive substrates for AlGaN-based UV light-emitting-diodes (LEDs). Its transparency up to 260 nm wavelength and n-type conductivity can lead to small absorptions of UV light in beta-Ga2O3 and possible vertical structures of the LEDs. In this study, we investigated the impact of thermal annealing temperature of the beta-Ga2O3 substrate. We characterized surface roughness of (100) beta-Ga2O3 after annealing with different temperatures and crystal qualities of GaN and AlGaN on the (100) beta-Ga2O3 by MOVPE. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | beta-Ga2O3（100） / thermal annealing / GaN / MOVPE / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 111, no. 45, CPM2011-23, pp. 77-81, May 2011. | |
| Paper # | CPM2011-23 | |
| Date of Issue | 2011-05-12 (ED, CPM, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2011-16 CPM2011-23 SDM2011-29 Link to ES Tech. Rep. Archives: ED2011-16 CPM2011-23 SDM2011-29 |
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| Conference Information | |
| Committee | CPM SDM ED |
| Conference Date | 2011-05-19 - 2011-05-20 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Univ. (VBL) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2011-05-CPM-SDM-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of GaN and AlGaN on B-Ga2O3 (100) substrate |
| Sub Title (in English) | |
| Keyword(1) | beta-Ga2O3（100） |
| Keyword(2) | thermal annealing |
| Keyword(3) | GaN |
| Keyword(4) | MOVPE |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shun Ito |
| 1st Author's Affiliation | Meijo University (Meijo Univ) |
| 2nd Author's Name | Kenichiro Takeda |
| 2nd Author's Affiliation | Meijo University (Meijo Univ) |
| 3rd Author's Name | Kengo Nagata |
| 3rd Author's Affiliation | Meijo University (Meijo Univ) |
| 4th Author's Name | Hiroki Aoshima |
| 4th Author's Affiliation | Meijo University (Meijo Univ) |
| 5th Author's Name | Kosuke Takehara |
| 5th Author's Affiliation | Meijo University (Meijo Univ) |
| 6th Author's Name | Motoaki Iwaya |
| 6th Author's Affiliation | Meijo University (Meijo Univ) |
| 7th Author's Name | Tetsuya Takeuchi |
| 7th Author's Affiliation | Meijo University (Meijo Univ) |
| 8th Author's Name | Satoshi Kamiyama |
| 8th Author's Affiliation | Meijo University (Meijo Univ) |
| 9th Author's Name | Isamu Akasaki |
| 9th Author's Affiliation | Meijo University/Nagoya University (Meijo Univ/Nagoya Univ) |
| 10th Author's Name | Hiroshi Amano |
| 10th Author's Affiliation | Nagoya University (Meijo Univ/Nagoya Univ) |
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| Speaker | Author-1 |
| Date Time | 2011-05-19 16:40:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | ED2011-16, CPM2011-23, SDM2011-29 |
| Volume (vol) | vol.111 |
| Number (no) | no.44(ED), no.45(CPM), no.46(SDM) |
| Page | pp.77-81 |
| #Pages | 5 |
| Date of Issue | 2011-05-12 (ED, CPM, SDM) |
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