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Paper Abstract and Keywords
Presentation 2011-01-28 14:30
Switching property of 3D-MEMS optical switch
Naru Nemoto, Masato Mizukami, Yuko Kawajiri, Johji Yamaguchi (NTT) PN2010-50 OPE2010-163 LQE2010-148 Link to ES Tech. Rep. Archives: OPE2010-163 LQE2010-148
Abstract (in Japanese) (See Japanese page) 
(in English) 3D-MEMS optical switches offer low power consumption and high switching capacity. We developed a prototype 128 x 128-port 3D-MEMS optical switch. The optical switch needs to adjust the angle of the mirror, which is a deflection device, when ambient temperature changes. The switch we developed implements a feedback algorithm that controls mirror tilt angles for fast and accurate optimization of the optical power at switching action. The parameters of the feedback algorithm were determined from the nonlinear voltage-angle characteristics of the mirrors. The switching time is within 50 ms at all switching paths, with the switch module which implements the feedback algorithm.
Keyword (in Japanese) (See Japanese page) 
(in English) MEMS / Optical switch / mirror / / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 395, OPE2010-163, pp. 133-136, Jan. 2011.
Paper # OPE2010-163 
Date of Issue 2011-01-20 (PN, OPE, LQE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF PN2010-50 OPE2010-163 LQE2010-148 Link to ES Tech. Rep. Archives: OPE2010-163 LQE2010-148

Conference Information
Conference Date 2011-01-27 - 2011-01-28 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OPE 
Conference Code 2011-01-OPE-EMT-LQE-PN-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Switching property of 3D-MEMS optical switch 
Sub Title (in English)  
Keyword(1) MEMS  
Keyword(2) Optical switch  
Keyword(3) mirror  
1st Author's Name Naru Nemoto  
1st Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
2nd Author's Name Masato Mizukami  
2nd Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
3rd Author's Name Yuko Kawajiri  
3rd Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
4th Author's Name Johji Yamaguchi  
4th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
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Date Time 2011-01-28 14:30:00 
Presentation Time 25 
Registration for OPE 
Paper # IEICE-PN2010-50,IEICE-OPE2010-163,IEICE-LQE2010-148 
Volume (vol) IEICE-110 
Number (no) no.394(PN), no.395(OPE), no.396(LQE) 
Page pp.133-136 
#Pages IEICE-4 
Date of Issue IEICE-PN-2011-01-20,IEICE-OPE-2011-01-20,IEICE-LQE-2011-01-20 

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