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| Presentation | 2010-12-17 15:10 Fabrication of PMMA waveguide devices using focused proton beam Kenta Miura (Gunma Univ.), Takahiro Satoh, Masashi Koka, Yasuyuki Ishii, Katsuyoshi Takano, Takeru Ohkubo, Wataru Kada, Akiyoshi Yamazaki, Akihito Yokoyama, Tomihiro Kamiya (JAEA), Masato Uehara, Hiromu Kiryu, Tomoyuki Sasaki, Osamu Hanaizumi (Gunma Univ.), Hiroyuki Nishikawa (Shibaura Inst. Tech.)  OPE2010-136 Link to ES Tech. Rep. Archives: OPE2010-136 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Proton beam writing (PBW) attracts recently much attention as a next-generation micro-fabrication technology. It is a direct writing technique and does not need any masks to transfer micro-patterns to sample surfaces. The refractive index of a poly(methyl methacralate) (PMMA) can be increased by proton irradiation. We have already succeeded in fabricating single-mode line waveguides for a wavelength of 1550 nm using this technique. In this study, we fabricated Y-junction polymer waveguides consisting of PMMA layers by using the PBW technique. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Proton Beam Writing / PMMA / Single-Mode Waveguide / Y-Junction Waveguide / Optical Switch / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 352, OPE2010-136, pp. 27-30, Dec. 2010. | |
| Paper # | OPE2010-136 | |
| Date of Issue | 2010-12-10 (OPE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OPE2010-136 Link to ES Tech. Rep. Archives: OPE2010-136 |
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| Conference Information | |
| Committee | OPE |
| Conference Date | 2010-12-17 - 2010-12-17 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | OPE |
| Conference Code | 2010-12-OPE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of PMMA waveguide devices using focused proton beam |
| Sub Title (in English) | |
| Keyword(1) | Proton Beam Writing |
| Keyword(2) | PMMA |
| Keyword(3) | Single-Mode Waveguide |
| Keyword(4) | Y-Junction Waveguide |
| Keyword(5) | Optical Switch |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kenta Miura |
| 1st Author's Affiliation | Gunma University (Gunma Univ.) |
| 2nd Author's Name | Takahiro Satoh |
| 2nd Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 3rd Author's Name | Masashi Koka |
| 3rd Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 4th Author's Name | Yasuyuki Ishii |
| 4th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 5th Author's Name | Katsuyoshi Takano |
| 5th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 6th Author's Name | Takeru Ohkubo |
| 6th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 7th Author's Name | Wataru Kada |
| 7th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 8th Author's Name | Akiyoshi Yamazaki |
| 8th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 9th Author's Name | Akihito Yokoyama |
| 9th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 10th Author's Name | Tomihiro Kamiya |
| 10th Author's Affiliation | Japan Atomic Energy Agency (JAEA) |
| 11th Author's Name | Masato Uehara |
| 11th Author's Affiliation | Gunma University (Gunma Univ.) |
| 12th Author's Name | Hiromu Kiryu |
| 12th Author's Affiliation | Gunma University (Gunma Univ.) |
| 13th Author's Name | Tomoyuki Sasaki |
| 13th Author's Affiliation | Gunma University (Gunma Univ.) |
| 14th Author's Name | Osamu Hanaizumi |
| 14th Author's Affiliation | Gunma University (Gunma Univ.) |
| 15th Author's Name | Hiroyuki Nishikawa |
| 15th Author's Affiliation | Shibaura Institute of Technology (Shibaura Inst. Tech.) |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2010-12-17 15:10:00 |
| Presentation Time | 25 minutes |
| Registration for | OPE |
| Paper # | OPE2010-136 |
| Volume (vol) | vol.110 |
| Number (no) | no.352 |
| Page | pp.27-30 |
| #Pages | 4 |
| Date of Issue | 2010-12-10 (OPE) |
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