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Paper Abstract and Keywords
Presentation 2010-10-25 16:35
Fabrication and Evaluation of Electron Gun for the Micro-Column to controll a radiation angle
Takahiro Fujino, Yasuo Takagi, Akifumi Koike (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida (AIST), Hidekazu Murata, Kentaro Sakata (Meijo Univ.), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.) ED2010-135 Link to ES Tech. Rep. Archives: ED2010-135
Abstract (in Japanese) (See Japanese page) 
(in English) Our final goal is to fabricate truly meaning micro-column, that consists of micro-sized field emitter and electro optics lens by using semiconductor processes. Micro-columns could be integrated with high density and finely focused multibeams could also be realized. It has highly potential for maskless lithography (ML2). It was already reported that the previous microcolumn with 5 stacked gate electrodes made a certain crossover less than 40 m in diameter. In order to control an initial emission angle to reduce a crossover size, we had introduced an newly designed immersion lens. The superior characteristics were described in this report.
Keyword (in Japanese) (See Japanese page) 
(in English) microcolumn / multibeam / maskless lithography / immersion lens / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 249, ED2010-135, pp. 39-42, Oct. 2010.
Paper # ED2010-135 
Date of Issue 2010-10-18 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2010-135 Link to ES Tech. Rep. Archives: ED2010-135

Conference Information
Committee ED  
Conference Date 2010-10-25 - 2010-10-26 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2010-10-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication and Evaluation of Electron Gun for the Micro-Column to controll a radiation angle 
Sub Title (in English)  
Keyword(1) microcolumn  
Keyword(2) multibeam  
Keyword(3) maskless lithography  
Keyword(4) immersion lens  
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1st Author's Name Takahiro Fujino  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Yasuo Takagi  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Akifumi Koike  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Masayoshi Nagao  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Tomoya Yoshida  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Hidekazu Murata  
6th Author's Affiliation Meijo University (Meijo Univ.)
7th Author's Name Kentaro Sakata  
7th Author's Affiliation Meijo University (Meijo Univ.)
8th Author's Name Yoichiro Neo  
8th Author's Affiliation Shizuoka University (Shizuoka Univ.)
9th Author's Name Toru Aoki  
9th Author's Affiliation Shizuoka University (Shizuoka Univ.)
10th Author's Name Hidenori Mimura  
10th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker
Date Time 2010-10-25 16:35:00 
Presentation Time 25 
Registration for ED 
Paper # IEICE-ED2010-135 
Volume (vol) IEICE-110 
Number (no) no.249 
Page pp.39-42 
#Pages IEICE-4 
Date of Issue IEICE-ED-2010-10-18 


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