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| Presentation | 2010-10-22 13:25 Deposition polymerization of fluoropolymer thin films by ion-assisted vapor deposition Tsuyoshi Matsuda (Tokyo Univ. Agricul. & Technol.), Kazuo Senda (Sumitomo Precision), Kuniaki Tanaka, Hiroaki Usui (Tokyo Univ. Agricul. & Technol.)  OME2010-47 Link to ES Tech. Rep. Archives: OME2010-47 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Ion-assisted deposition was employed as a new technique for preparing fuluoropolymer thin films. A fluorinated alkylacrylate monomer was deposited on the substrate surface under irradiation of low energy Ar ions. As a consequence, highly hydrophobic fluoropolymer thin films were obtained. However, no films were accumulated when the monomer was deposited without ion irradiation. The films deposited on Au surface had excellent smoothness. On the other hand, the films deposited on glass substrate had considerable extrusions due probably to coagulation of monomer residue. The roughness was improved by rinsing the film with HCFC-225 solvent. By depositing a 100-nm thick film on glass surface, the reflectance was reduced from 8% to 3%. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ion-assisted deposition / deposition polymerization / fluoropolymer / fluorinated alkylacrylate / antireflective coating / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 243, OME2010-47, pp. 5-10, Oct. 2010. | |
| Paper # | OME2010-47 | |
| Date of Issue | 2010-10-15 (OME) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OME2010-47 Link to ES Tech. Rep. Archives: OME2010-47 |
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| Conference Information | |
| Committee | OME |
| Conference Date | 2010-10-22 - 2010-10-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | NTT Musashino R&D Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Organic Devices, etc |
| Paper Information | |
| Registration To | OME |
| Conference Code | 2010-10-OME |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deposition polymerization of fluoropolymer thin films by ion-assisted vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | ion-assisted deposition |
| Keyword(2) | deposition polymerization |
| Keyword(3) | fluoropolymer |
| Keyword(4) | fluorinated alkylacrylate |
| Keyword(5) | antireflective coating |
| Keyword(6) | |
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| 1st Author's Name | Tsuyoshi Matsuda |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.) |
| 2nd Author's Name | Kazuo Senda |
| 2nd Author's Affiliation | Sumitomo Precision Products Co.,Ltd. (Sumitomo Precision) |
| 3rd Author's Name | Kuniaki Tanaka |
| 3rd Author's Affiliation | Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.) |
| 4th Author's Name | Hiroaki Usui |
| 4th Author's Affiliation | Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.) |
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| Speaker | Author-1 |
| Date Time | 2010-10-22 13:25:00 |
| Presentation Time | 25 minutes |
| Registration for | OME |
| Paper # | OME2010-47 |
| Volume (vol) | vol.110 |
| Number (no) | no.243 |
| Page | pp.5-10 |
| #Pages | 6 |
| Date of Issue | 2010-10-15 (OME) |
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