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Paper Abstract and Keywords
Presentation 2010-09-29 15:40
Measurement of Propagation Characteristics of Leaky Surface Acoustic Waves for Lossy Specimen by the LFB Ultrasonic Material Characterization System
Takanori Kondo, Yuji Ohashi, Mototaka Arakawa, Jun-ichi Kushibiki (Tohoku Univ.) US2010-54
Abstract (in Japanese) (See Japanese page) 
(in English) We investigated scattering effect observed in leaky surface acoustic wave (LSAW) propagation characteristics (phase velocity and propagation attenuation) measured for ZnO film/SiO2 silica glass specimen with different surface roughnesses. We prepared two ZnO films with 10-\mum thickness fabricated on SiO2 silica glass by the DC sputtering, one is a transparent film with smooth surface and the other is a cloudy film with rough surface. We measured frequency dependences of LSAW propagation characteristics at 100-300 MHz for both the film specimens, resulting in 30-40 m/s decrease for the smooth film and 46-66 m/s decrease for the rough film in LSAW velocity compared with calculated results assuming a single crystal film. In the results of normalized attenuation, we observed almost constant and slight difference of 0.0004 for the smooth film and difference from 0.0008 to 0.0034 increasing with frequency for the rough film compared with the calculated result. From the difference between the results of the smooth and rough films, we could extract the variations in LSAW propagation characteristics due to scattering at the specimen surface.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO polycrystalline film / scattering at surface / line-focus-beam ultrasonic material characterization system / leaky surface acoustic wave propagation characteristics / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 213, US2010-54, pp. 33-37, Sept. 2010.
Paper # US2010-54 
Date of Issue 2010-09-22 (US) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2010-09-29 - 2010-09-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2010-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Measurement of Propagation Characteristics of Leaky Surface Acoustic Waves for Lossy Specimen by the LFB Ultrasonic Material Characterization System 
Sub Title (in English)  
Keyword(1) ZnO polycrystalline film  
Keyword(2) scattering at surface  
Keyword(3) line-focus-beam ultrasonic material characterization system  
Keyword(4) leaky surface acoustic wave propagation characteristics  
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1st Author's Name Takanori Kondo  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Yuji Ohashi  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Mototaka Arakawa  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Jun-ichi Kushibiki  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker
Date Time 2010-09-29 15:40:00 
Presentation Time 25 
Registration for US 
Paper # IEICE-US2010-54 
Volume (vol) IEICE-110 
Number (no) no.213 
Page pp.33-37 
#Pages IEICE-5 
Date of Issue IEICE-US-2010-09-22 


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