Paper Abstract and Keywords |
Presentation |
2010-09-29 15:40
Measurement of Propagation Characteristics of Leaky Surface Acoustic Waves for Lossy Specimen by the LFB Ultrasonic Material Characterization System Takanori Kondo, Yuji Ohashi, Mototaka Arakawa, Jun-ichi Kushibiki (Tohoku Univ.) US2010-54 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We investigated scattering effect observed in leaky surface acoustic wave (LSAW) propagation characteristics (phase velocity and propagation attenuation) measured for ZnO film/SiO2 silica glass specimen with different surface roughnesses. We prepared two ZnO films with 10-\mum thickness fabricated on SiO2 silica glass by the DC sputtering, one is a transparent film with smooth surface and the other is a cloudy film with rough surface. We measured frequency dependences of LSAW propagation characteristics at 100-300 MHz for both the film specimens, resulting in 30-40 m/s decrease for the smooth film and 46-66 m/s decrease for the rough film in LSAW velocity compared with calculated results assuming a single crystal film. In the results of normalized attenuation, we observed almost constant and slight difference of 0.0004 for the smooth film and difference from 0.0008 to 0.0034 increasing with frequency for the rough film compared with the calculated result. From the difference between the results of the smooth and rough films, we could extract the variations in LSAW propagation characteristics due to scattering at the specimen surface. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
ZnO polycrystalline film / scattering at surface / line-focus-beam ultrasonic material characterization system / leaky surface acoustic wave propagation characteristics / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 110, no. 213, US2010-54, pp. 33-37, Sept. 2010. |
Paper # |
US2010-54 |
Date of Issue |
2010-09-22 (US) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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US2010-54 |
Conference Information |
Committee |
US |
Conference Date |
2010-09-29 - 2010-09-30 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Tohoku Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
General |
Paper Information |
Registration To |
US |
Conference Code |
2010-09-US |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Measurement of Propagation Characteristics of Leaky Surface Acoustic Waves for Lossy Specimen by the LFB Ultrasonic Material Characterization System |
Sub Title (in English) |
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Keyword(1) |
ZnO polycrystalline film |
Keyword(2) |
scattering at surface |
Keyword(3) |
line-focus-beam ultrasonic material characterization system |
Keyword(4) |
leaky surface acoustic wave propagation characteristics |
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1st Author's Name |
Takanori Kondo |
1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
2nd Author's Name |
Yuji Ohashi |
2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
3rd Author's Name |
Mototaka Arakawa |
3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
4th Author's Name |
Jun-ichi Kushibiki |
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Tohoku University (Tohoku Univ.) |
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Speaker |
1 |
Date Time |
2010-09-29 15:40:00 |
Presentation Time |
25 |
Registration for |
US |
Paper # |
IEICE-US2010-54 |
Volume (vol) |
IEICE-110 |
Number (no) |
no.213 |
Page |
pp.33-37 |
#Pages |
IEICE-5 |
Date of Issue |
IEICE-US-2010-09-22 |
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