Paper Abstract and Keywords |
Presentation |
2010-07-02 11:15
Interaction of bis-diethylaminosilane with hydroxylized Si (001) surface for SiO2 thin-film growth using density functional theory Seung-Bin Baek, Dae-Hee Kim (Korea Univ. of Tech. and Edu.), Yong-Chan Jeong (ASM Genitech), Yeong-Cheol Kim (Korea Univ. of Tech. and Edu.) ED2010-89 SDM2010-90 Link to ES Tech. Rep. Archives: ED2010-89 SDM2010-90 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
(Not available yet) |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
/ / / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 110, no. 109, ED2010-89, pp. 165-168, June 2010. |
Paper # |
ED2010-89 |
Date of Issue |
2010-06-23 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2010-89 SDM2010-90 Link to ES Tech. Rep. Archives: ED2010-89 SDM2010-90 |
Conference Information |
Committee |
ED SDM |
Conference Date |
2010-06-30 - 2010-07-02 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Tokyo Inst. of Tech. Ookayama Campus |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
2010 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices |
Paper Information |
Registration To |
ED |
Conference Code |
2010-06-ED-SDM |
Language |
English |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Interaction of bis-diethylaminosilane with hydroxylized Si (001) surface for SiO2 thin-film growth using density functional theory |
Sub Title (in English) |
|
Keyword(1) |
|
Keyword(2) |
|
Keyword(3) |
|
Keyword(4) |
|
Keyword(5) |
|
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Seung-Bin Baek |
1st Author's Affiliation |
Korea University of Technology and Education (Korea Univ. of Tech. and Edu.) |
2nd Author's Name |
Dae-Hee Kim |
2nd Author's Affiliation |
Korea University of Technology and Education (Korea Univ. of Tech. and Edu.) |
3rd Author's Name |
Yong-Chan Jeong |
3rd Author's Affiliation |
ASM Genitech Korea Ltd. (ASM Genitech) |
4th Author's Name |
Yeong-Cheol Kim |
4th Author's Affiliation |
Korea University of Technology and Education (Korea Univ. of Tech. and Edu.) |
5th Author's Name |
|
5th Author's Affiliation |
() |
6th Author's Name |
|
6th Author's Affiliation |
() |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2010-07-02 11:15:00 |
Presentation Time |
15 minutes |
Registration for |
ED |
Paper # |
ED2010-89, SDM2010-90 |
Volume (vol) |
vol.110 |
Number (no) |
no.109(ED), no.110(SDM) |
Page |
pp.165-168 |
#Pages |
4 |
Date of Issue |
2010-06-23 (ED, SDM) |
|