Paper Abstract and Keywords |
Presentation |
2010-06-30 17:10
Electrical Characteristics of Atomic Layer Deposited Tungsten Nitride Diffusion Barrier for Cu Interconnects Yong Tae Kim (KIST), Eui Bok Lee (Koria Univ./KIST), Young Hwan Kim, Chun Keun Kim (KIST), Byeong Kwon Ju (Koria Univ.) ED2010-65 SDM2010-66 Link to ES Tech. Rep. Archives: ED2010-65 SDM2010-66 |
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Reference Info. |
IEICE Tech. Rep., vol. 110, no. 109, ED2010-65, pp. 61-63, June 2010. |
Paper # |
ED2010-65 |
Date of Issue |
2010-06-23 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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ED2010-65 SDM2010-66 Link to ES Tech. Rep. Archives: ED2010-65 SDM2010-66 |
Conference Information |
Committee |
ED SDM |
Conference Date |
2010-06-30 - 2010-07-02 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Tokyo Inst. of Tech. Ookayama Campus |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
2010 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices |
Paper Information |
Registration To |
ED |
Conference Code |
2010-06-ED-SDM |
Language |
English |
Title (in Japanese) |
(See Japanese page) |
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Title (in English) |
Electrical Characteristics of Atomic Layer Deposited Tungsten Nitride Diffusion Barrier for Cu Interconnects |
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1st Author's Name |
Yong Tae Kim |
1st Author's Affiliation |
Korea Institute of Science and Technology (KIST) |
2nd Author's Name |
Eui Bok Lee |
2nd Author's Affiliation |
Koria University/korea Institute od Science and Technology (Koria Univ./KIST) |
3rd Author's Name |
Young Hwan Kim |
3rd Author's Affiliation |
Korea Institute of Science and Technology (KIST) |
4th Author's Name |
Chun Keun Kim |
4th Author's Affiliation |
Korea Institute of Science and Technology (KIST) |
5th Author's Name |
Byeong Kwon Ju |
5th Author's Affiliation |
Koria University (Koria Univ.) |
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Speaker |
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Date Time |
2010-06-30 17:10:00 |
Presentation Time |
15 minutes |
Registration for |
ED |
Paper # |
ED2010-65, SDM2010-66 |
Volume (vol) |
vol.110 |
Number (no) |
no.109(ED), no.110(SDM) |
Page |
pp.61-63 |
#Pages |
3 |
Date of Issue |
2010-06-23 (ED, SDM) |
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