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| Presentation | 2010-05-27 11:20 Acoustic damping effect on capacitive micromachined ultrasonic transducer Seung-Mok Lee (Ingen MSL), Bu-Sang Cha, Masanori Okuyama (Osaka Univ.)  EA2010-15 SIP2010-15 SP2010-15 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Acoustic damping of a capacitive micromachined ultrasonic transducer in air makes a mechanical impedance in the membrane vibration, which plays an important role in the transformation efficiency of the device. We present the acoustic damping effect on the transformation efficiency of CMUT device, and those results are compared with the other factors such as capacitance variations originated from the change of air-hole rate (AR) in the total membrane area. Damping ratio of perforated membrane plate is computed under each condition, and the results of that are introduced to the calculation of membrane displacement using finite element method for the consideration of squeeze-film damping effect. Q factor and transformation efficiency of the CMUT device under the various AR of the membrane and device dimension conditions are studied, and the acoustic damping effect is discussed for the design optimization of that. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | CMUT / Damping / Transformation efficiency / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 54, EA2010-15, pp. 85-89, May 2010. | |
| Paper # | EA2010-15 | |
| Date of Issue | 2010-05-19 (EA, SIP, SP) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EA2010-15 SIP2010-15 SP2010-15 |
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| Conference Information | |
| Committee | SP EA SIP |
| Conference Date | 2010-05-26 - 2010-05-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Konan Univ. (Hirao Seminar House) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Speech, Engineering/Electro Acoustics, Signal Processing，and Related Topics |
| Paper Information | |
| Registration To | EA |
| Conference Code | 2010-05-SP-EA-SIP |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Acoustic damping effect on capacitive micromachined ultrasonic transducer |
| Sub Title (in English) | |
| Keyword(1) | CMUT |
| Keyword(2) | Damping |
| Keyword(3) | Transformation efficiency |
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| 1st Author's Name | Seung-Mok Lee |
| 1st Author's Affiliation | Ingen MSL Inc. (Ingen MSL) |
| 2nd Author's Name | Bu-Sang Cha |
| 2nd Author's Affiliation | Osaka University (Osaka Univ.) |
| 3rd Author's Name | Masanori Okuyama |
| 3rd Author's Affiliation | Osaka University (Osaka Univ.) |
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| Speaker | Author-1 |
| Date Time | 2010-05-27 11:20:00 |
| Presentation Time | 25 minutes |
| Registration for | EA |
| Paper # | EA2010-15, SIP2010-15, SP2010-15 |
| Volume (vol) | vol.110 |
| Number (no) | no.54(EA), no.55(SIP), no.56(SP) |
| Page | pp.85-89 |
| #Pages | 5 |
| Date of Issue | 2010-05-19 (EA, SIP, SP) |
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