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| Presentation | 2009-11-12 15:30 Development of MEMS and Equivalent Circuit Generator Nobuyo Fujiwara, Kazuo Asaumi (Mizuho Information & Research Institute), Tomoyuki Koike (Micromachine Center), Toshiyuki Tsuchiya (Kyoto Univ,), Gen Hashiguchi (Shizuoka Univ.)  SDM2009-140 Link to ES Tech. Rep. Archives: SDM2009-140 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In order to improve CMOS-integrated MEMS(micro electromechanical system) devices design efficiency, we developed a design platform, MEMS equivalent circuit generator, based on equivalent circuit model of MEMS devices. By using this design platform, design engineers can simulate complete circuits, including the peripheral circuits such as sensing and driving units. This paper describes equivalent circuit for MEMS for expressing mechanical and electromechanical element within circuit simulation, in order to simulate their dynamic behaviors easily. To obtain equivalent circuits, we have developed the unified procedure that incorporates energy functions. In order to validate this approach, the resonant property of electrostatic comb-drive actuator was simulated using the equivalent circuit generated and measured experimentally. The simulated resonant frequency was in good agreement with the measurement and the admittance characteristics were well described using this circuit. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | circuit simulation / equivalent circuit / comb drive actuator / CMOS-MEMS integration / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 278, SDM2009-140, pp. 29-32, Nov. 2009. | |
| Paper # | SDM2009-140 | |
| Date of Issue | 2009-11-05 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2009-140 Link to ES Tech. Rep. Archives: SDM2009-140 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2009-11-12 - 2009-11-13 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit Simulation, etc. |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2009-11-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of MEMS and Equivalent Circuit Generator |
| Sub Title (in English) | |
| Keyword(1) | circuit simulation |
| Keyword(2) | equivalent circuit |
| Keyword(3) | comb drive actuator |
| Keyword(4) | CMOS-MEMS integration |
| Keyword(5) | |
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| 1st Author's Name | Nobuyo Fujiwara |
| 1st Author's Affiliation | Mizuho Information & Research Institute, Inc. (Mizuho Information & Research Institute) |
| 2nd Author's Name | Kazuo Asaumi |
| 2nd Author's Affiliation | Mizuho Information & Research Institute, Inc. (Mizuho Information & Research Institute) |
| 3rd Author's Name | Tomoyuki Koike |
| 3rd Author's Affiliation | Micromachine Center (Micromachine Center) |
| 4th Author's Name | Toshiyuki Tsuchiya |
| 4th Author's Affiliation | Kyoto University (Kyoto Univ,) |
| 5th Author's Name | Gen Hashiguchi |
| 5th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
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| Speaker | Author-1 |
| Date Time | 2009-11-12 15:30:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2009-140 |
| Volume (vol) | vol.109 |
| Number (no) | no.278 |
| Page | pp.29-32 |
| #Pages | 4 |
| Date of Issue | 2009-11-05 (SDM) |
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