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Paper Abstract and Keywords
Presentation 2009-11-12 15:30
Development of MEMS and Equivalent Circuit Generator
Nobuyo Fujiwara, Kazuo Asaumi (Mizuho Information & Research Institute), Tomoyuki Koike (Micromachine Center), Toshiyuki Tsuchiya (Kyoto Univ,), Gen Hashiguchi (Shizuoka Univ.) SDM2009-140 Link to ES Tech. Rep. Archives: SDM2009-140
Abstract (in Japanese) (See Japanese page) 
(in English) In order to improve CMOS-integrated MEMS(micro electromechanical system) devices design efficiency, we developed a design platform, MEMS equivalent circuit generator, based on equivalent circuit model of MEMS devices. By using this design platform, design engineers can simulate complete circuits, including the peripheral circuits such as sensing and driving units. This paper describes equivalent circuit for MEMS for expressing mechanical and electromechanical element within circuit simulation, in order to simulate their dynamic behaviors easily. To obtain equivalent circuits, we have developed the unified procedure that incorporates energy functions. In order to validate this approach, the resonant property of electrostatic comb-drive actuator was simulated using the equivalent circuit generated and measured experimentally. The simulated resonant frequency was in good agreement with the measurement and the admittance characteristics were well described using this circuit.
Keyword (in Japanese) (See Japanese page) 
(in English) circuit simulation / equivalent circuit / comb drive actuator / CMOS-MEMS integration / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 278, SDM2009-140, pp. 29-32, Nov. 2009.
Paper # SDM2009-140 
Date of Issue 2009-11-05 (SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2009-140 Link to ES Tech. Rep. Archives: SDM2009-140

Conference Information
Committee SDM  
Conference Date 2009-11-12 - 2009-11-13 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process, Device, Circuit Simulation, etc. 
Paper Information
Registration To SDM 
Conference Code 2009-11-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of MEMS and Equivalent Circuit Generator 
Sub Title (in English)  
Keyword(1) circuit simulation  
Keyword(2) equivalent circuit  
Keyword(3) comb drive actuator  
Keyword(4) CMOS-MEMS integration  
1st Author's Name Nobuyo Fujiwara  
1st Author's Affiliation Mizuho Information & Research Institute, Inc. (Mizuho Information & Research Institute)
2nd Author's Name Kazuo Asaumi  
2nd Author's Affiliation Mizuho Information & Research Institute, Inc. (Mizuho Information & Research Institute)
3rd Author's Name Tomoyuki Koike  
3rd Author's Affiliation Micromachine Center (Micromachine Center)
4th Author's Name Toshiyuki Tsuchiya  
4th Author's Affiliation Kyoto University (Kyoto Univ,)
5th Author's Name Gen Hashiguchi  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Date Time 2009-11-12 15:30:00 
Presentation Time 25 
Registration for SDM 
Paper # IEICE-SDM2009-140 
Volume (vol) IEICE-109 
Number (no) no.278 
Page pp.29-32 
#Pages IEICE-4 
Date of Issue IEICE-SDM-2009-11-05 

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