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Paper Abstract and Keywords
Presentation 2009-10-01 15:20
[Invited Talk] Integrated MEMS and Biomedical MEMS
Masayoshi Esashi (Tohoku Univ.) ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44
Abstract (in Japanese) (See Japanese page) 
(in English) Integrated MEMS have been effectively applied for capacitive sensors by integrating capacitance detection circuits and for arrayed MEMS to reduce the lead wires. Integrated MEMS are expected for RF to reduce stray inductance. Mechanical sensors for pressure, acceleration and force, biomedical devices as active catheter and ultrasound transducers and wireless chips which have multiple band MEMS filters are described as examples of the integrated MEMS.
Keyword (in Japanese) (See Japanese page) 
(in English) Integrated MEMS / Biomedical MEMS / Integrated Capacitive Pressure Sensor / Multi-band Wireless Chip / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 214, ICD2009-44, pp. 57-62, Oct. 2009.
Paper # ICD2009-44 
Date of Issue 2009-09-24 (ICD) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44

Conference Information
Committee ICD ITE-IST  
Conference Date 2009-10-01 - 2009-10-02 
Place (in Japanese) (See Japanese page) 
Place (in English) CIC Tokyo (Tamachi) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed analog and digital, RF, and sensor interface circuitry 
Paper Information
Registration To ICD 
Conference Code 2009-10-ICD-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Integrated MEMS and Biomedical MEMS 
Sub Title (in English)  
Keyword(1) Integrated MEMS  
Keyword(2) Biomedical MEMS  
Keyword(3) Integrated Capacitive Pressure Sensor  
Keyword(4) Multi-band Wireless Chip  
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1st Author's Name Masayoshi Esashi  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker
Date Time 2009-10-01 15:20:00 
Presentation Time 50 
Registration for ICD 
Paper # IEICE-ICD2009-44 
Volume (vol) IEICE-109 
Number (no) no.214 
Page pp.57-62 
#Pages IEICE-6 
Date of Issue IEICE-ICD-2009-09-24 


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