IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
... (for ESS/CS/ES/ISS)
Tech. Rep. Archives
... (for ES/CS)
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2009-10-01 15:20
[Invited Talk] Integrated MEMS and Biomedical MEMS
Masayoshi Esashi (Tohoku Univ.) ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44
Abstract (in Japanese) (See Japanese page) 
(in English) Integrated MEMS have been effectively applied for capacitive sensors by integrating capacitance detection circuits and for arrayed MEMS to reduce the lead wires. Integrated MEMS are expected for RF to reduce stray inductance. Mechanical sensors for pressure, acceleration and force, biomedical devices as active catheter and ultrasound transducers and wireless chips which have multiple band MEMS filters are described as examples of the integrated MEMS.
Keyword (in Japanese) (See Japanese page) 
(in English) Integrated MEMS / Biomedical MEMS / Integrated Capacitive Pressure Sensor / Multi-band Wireless Chip / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 214, ICD2009-44, pp. 57-62, Oct. 2009.
Paper # ICD2009-44 
Date of Issue 2009-09-24 (ICD) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44

Conference Information
Committee ICD ITE-IST  
Conference Date 2009-10-01 - 2009-10-02 
Place (in Japanese) (See Japanese page) 
Place (in English) CIC Tokyo (Tamachi) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed analog and digital, RF, and sensor interface circuitry 
Paper Information
Registration To ICD 
Conference Code 2009-10-ICD-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Integrated MEMS and Biomedical MEMS 
Sub Title (in English)  
Keyword(1) Integrated MEMS  
Keyword(2) Biomedical MEMS  
Keyword(3) Integrated Capacitive Pressure Sensor  
Keyword(4) Multi-band Wireless Chip  
1st Author's Name Masayoshi Esashi  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name  
2nd Author's Affiliation ()
3rd Author's Name  
3rd Author's Affiliation ()
4th Author's Name  
4th Author's Affiliation ()
5th Author's Name  
5th Author's Affiliation ()
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Date Time 2009-10-01 15:20:00 
Presentation Time 50 
Registration for ICD 
Paper # IEICE-ICD2009-44 
Volume (vol) IEICE-109 
Number (no) no.214 
Page pp.57-62 
#Pages IEICE-6 
Date of Issue IEICE-ICD-2009-09-24 

[Return to Top Page]

[Return to IEICE Web Page]

The Institute of Electronics, Information and Communication Engineers (IEICE), Japan