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| Presentation | 2009-09-30 11:45 Characterization of ZnO Polycrystalline Films on Silica Glass by the LFB Ultrasonic Material Characterization System Takanori Kondo, Sho Yoshida, Yuusuke Kourai, Yuji Ohashi, Mototaka Arakawa, Jun-ichi Kushibiki (Tohoku Univ.), Satoshi Fujii (SEIKO EPSON)  US2009-53 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We evaluated several ZnO polycrystalline films with different thicknesses fabricated on silica glass substrates by DC sputtering and RF magnetron sputtering methods using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. We measured fH (product of frequency f and film thickness H) dependences of leaky surface acoustic wave (LSAW) velocities from 100 to 300 MHz for each ZnO-film specimen. The measured results exhibited an fH dependence similar to the calculated ones. The LSAW velocities decreased from 3424 m/s for silica glass to 2672 m/s for Z-cut ZnO single crystal as fH increased. The measured LSAW velocities became lower than the calculated ones: decreasing of 27.2 m/s for the RF-ZnO film and 42.6 m/s for the DC-ZnO film from a calculated value of 2672.1 m/s at fH=1680 Hz·m. These velocity decreases were explained due to decreases in elastic constant associated with ZnO polycrystalline film structure: about 6% for the DC-ZnO film and about 3% for the RF-ZnO film. We also measured LSAW velocity distributions at 225 MHz and obtained a large velocity variation of about 22 m/s for a 4-mm-thick DC-ZnO film specimen. We estimated film thickness distributions from the fH dependence of LSAW velocities, resulting in about 0.66 µm for the DC-ZnO film and about 0.04 µm for the RF-ZnO film. We demonstrated that our ultrasonic method is useful for evaluating significant difference in acoustic properties between two ZnO films with different c-axis orientations fabricated by different sputtering methods. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ZnO polycrystalline film / DC sputtering method / RF magnetron sputtering method / line-focus-beam ultrasonic material characterization system / leaky surface acoustic wave velocity / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 213, US2009-53, pp. 89-94, Sept. 2009. | |
| Paper # | US2009-53 | |
| Date of Issue | 2009-09-22 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2009-53 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2009-09-29 - 2009-09-30 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Noboribetsu Grand Hotel |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2009-09-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of ZnO Polycrystalline Films on Silica Glass by the LFB Ultrasonic Material Characterization System |
| Sub Title (in English) | |
| Keyword(1) | ZnO polycrystalline film |
| Keyword(2) | DC sputtering method |
| Keyword(3) | RF magnetron sputtering method |
| Keyword(4) | line-focus-beam ultrasonic material characterization system |
| Keyword(5) | leaky surface acoustic wave velocity |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Takanori Kondo |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Sho Yoshida |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Yuusuke Kourai |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Yuji Ohashi |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Mototaka Arakawa |
| 5th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 6th Author's Name | Jun-ichi Kushibiki |
| 6th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 7th Author's Name | Satoshi Fujii |
| 7th Author's Affiliation | SEIKO EPSON CORPORATION (SEIKO EPSON) |
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| Speaker | 1 |
| Date Time | 2009-09-30 11:45:00 |
| Presentation Time | 25 |
| Registration for | US |
| Paper # | IEICE-US2009-53 |
| Volume (vol) | IEICE-109 |
| Number (no) | no.213 |
| Page | pp.89-94 |
| #Pages | IEICE-6 |
| Date of Issue | IEICE-US-2009-09-22 |
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