講演抄録/キーワード |
講演名 |
2009-06-26 11:15
Random Telegraph Signals in Two-Dimensional Array of Si Quantum Dots ○Katsunori Makihara・Mitsuhisa Ikeda・Akira Kawanami・Seiichi Miyazaki(Hiroshima Univ.) ED2009-92 SDM2009-87 エレソ技報アーカイブへのリンク:ED2009-92 SDM2009-87 |
抄録 |
(和) |
Silicon-quantum-dots (Si-QDs) with an areal density as high as ~1012cm-2 were self-assembled on thermally-grown SiO2 by low pressure CVD using Si2H6, in which OH-terminated SiO2 surface prior to the Si CVD was exposed to GeH4 to create nucleation sites uniformly. After thermal oxidation of Si-QDs surface, two-dimensional electronic transport through the Si-QDs array was measured with co-planar Al electrodes evaporated on the array surface. Random telegraph signals were clearly observed at constant applied bias conditions in dark condition and under light irradiation at room temperature. The result indicates the charging and discharging of a dot adjacent to the percolation current path in the dots array. |
(英) |
Silicon-quantum-dots (Si-QDs) with an areal density as high as ~1012cm-2 were self-assembled on thermally-grown SiO2 by low pressure CVD using Si2H6, in which OH-terminated SiO2 surface prior to the Si CVD was exposed to GeH4 to create nucleation sites uniformly. After thermal oxidation of Si-QDs surface, two-dimensional electronic transport through the Si-QDs array was measured with co-planar Al electrodes evaporated on the array surface. Random telegraph signals were clearly observed at constant applied bias conditions in dark condition and under light irradiation at room temperature. The result indicates the charging and discharging of a dot adjacent to the percolation current path in the dots array. |
キーワード |
(和) |
Si量子ドット / ランダム・テレグラフ・シグナル / AFM/KFM / / / / / |
(英) |
Si Quantum Dots / Random Telegraph Signals / AFM/KFM / / / / / |
文献情報 |
信学技報, vol. 109, no. 98, SDM2009-87, pp. 181-184, 2009年6月. |
資料番号 |
SDM2009-87 |
発行日 |
2009-06-17 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
著作権に ついて |
技術研究報告に掲載された論文の著作権は電子情報通信学会に帰属します.(許諾番号:10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
PDFダウンロード |
ED2009-92 SDM2009-87 エレソ技報アーカイブへのリンク:ED2009-92 SDM2009-87 |