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| Presentation | 2009-06-25 12:00 Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy Tomoyuki Suwa (Tohoku Univ.), Takashi Aratani (Shin-Etsu Chemical), Masaaki Higuchi (TOSHIBA), Sigetoshi Sugawa (Tohoku Univ.), Eiji Ikenaga (JASRI), Jiro Ushio (Hitachi), Hiroshi Nohira (Musashi Inst. of Tech.), Akinobu Teramoto, Tadahiro Ohmi, Takeo Hattori (Tohoku Univ.)  ED2009-86 SDM2009-81 Link to ES Tech. Rep. Archives: ED2009-86 SDM2009-81 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 98, SDM2009-81, pp. 157-160, June 2009. | |
| Paper # | SDM2009-81 | |
| Date of Issue | 2009-06-17 (ED, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2009-86 SDM2009-81 Link to ES Tech. Rep. Archives: ED2009-86 SDM2009-81 |
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| Conference Information | |
| Committee | SDM ED |
| Conference Date | 2009-06-24 - 2009-06-26 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Haeundae Grand Hotel, Busan, Korea |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | 2009 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2009-06-SDM-ED |
| Language | English |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy |
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| 1st Author's Name | Tomoyuki Suwa |
| 1st Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Takashi Aratani |
| 2nd Author's Affiliation | Shin-Etsu Chemical Co., Ltd. (Shin-Etsu Chemical) |
| 3rd Author's Name | Masaaki Higuchi |
| 3rd Author's Affiliation | TOSHIBA CORPORATION, (TOSHIBA) |
| 4th Author's Name | Sigetoshi Sugawa |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Eiji Ikenaga |
| 5th Author's Affiliation | Japan Synchrotron Radiation Research Institute (JASRI) |
| 6th Author's Name | Jiro Ushio |
| 6th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 7th Author's Name | Hiroshi Nohira |
| 7th Author's Affiliation | Musashi Institute. of Technology. (Musashi Inst. of Tech.) |
| 8th Author's Name | Akinobu Teramoto |
| 8th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University (Tohoku Univ.) |
| 9th Author's Name | Tadahiro Ohmi |
| 9th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University (Tohoku Univ.) |
| 10th Author's Name | Takeo Hattori |
| 10th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2009-06-25 12:00:00 |
| Presentation Time | 15 minutes |
| Registration for | SDM |
| Paper # | ED2009-86, SDM2009-81 |
| Volume (vol) | vol.109 |
| Number (no) | no.97(ED), no.98(SDM) |
| Page | pp.157-160 |
| #Pages | 4 |
| Date of Issue | 2009-06-17 (ED, SDM) |
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