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Paper Abstract and Keywords
Presentation 2009-06-11 14:55
Dependence of Characteristics of Methyl-BCN Film on RF Bias
Takuro Masuzumi, Makoto Hara, Hidemitsu Aoki, Zhiming Lu, Chiharu Kimura, Takashi Sugino (Osaka Univ.) ED2009-39 Link to ES Tech. Rep. Archives: ED2009-39
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Reference Info. IEICE Tech. Rep., vol. 109, no. 81, ED2009-39, pp. 15-20, June 2009.
Paper # ED2009-39 
Date of Issue 2009-06-04 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-39 Link to ES Tech. Rep. Archives: ED2009-39

Conference Information
Committee ED  
Conference Date 2009-06-11 - 2009-06-12 
Place (in Japanese) (See Japanese page) 
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Paper Information
Registration To ED 
Conference Code 2009-06-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Dependence of Characteristics of Methyl-BCN Film on RF Bias 
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1st Author's Name Takuro Masuzumi  
1st Author's Affiliation Osaka University (Osaka Univ.)
2nd Author's Name Makoto Hara  
2nd Author's Affiliation Osaka University (Osaka Univ.)
3rd Author's Name Hidemitsu Aoki  
3rd Author's Affiliation Osaka University (Osaka Univ.)
4th Author's Name Zhiming Lu  
4th Author's Affiliation Osaka University (Osaka Univ.)
5th Author's Name Chiharu Kimura  
5th Author's Affiliation Osaka University (Osaka Univ.)
6th Author's Name Takashi Sugino  
6th Author's Affiliation Osaka University (Osaka Univ.)
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Speaker
Date Time 2009-06-11 14:55:00 
Presentation Time 25 
Registration for ED 
Paper # IEICE-ED2009-39 
Volume (vol) IEICE-109 
Number (no) no.81 
Page pp.15-20 
#Pages IEICE-6 
Date of Issue IEICE-ED-2009-06-04 


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