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Presentation 2009-06-11 13:25
Evaluation of Cu-Inhibitor Residue for Post Cu-CMP Cleaning
Atsushi Ito, Ken Harada, Yasuhiro Kawase, Fumikazu Mizutani (Mitsubishi Chem.), Makoto Hara, Hidemitsu Aoki, Chiharu Kimura, Takashi Sugino (Osaka Univ.) ED2009-36 Link to ES Tech. Rep. Archives: ED2009-36
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Reference Info. IEICE Tech. Rep., vol. 109, no. 81, ED2009-36, pp. 1-6, June 2009.
Paper # ED2009-36 
Date of Issue 2009-06-04 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-36 Link to ES Tech. Rep. Archives: ED2009-36

Conference Information
Committee ED  
Conference Date 2009-06-11 - 2009-06-12 
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Paper Information
Registration To ED 
Conference Code 2009-06-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of Cu-Inhibitor Residue for Post Cu-CMP Cleaning 
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1st Author's Name Atsushi Ito  
1st Author's Affiliation Mitsucishi Chemical Corporation (Mitsubishi Chem.)
2nd Author's Name Ken Harada  
2nd Author's Affiliation Mitsucishi Chemical Corporation (Mitsubishi Chem.)
3rd Author's Name Yasuhiro Kawase  
3rd Author's Affiliation Mitsucishi Chemical Corporation (Mitsubishi Chem.)
4th Author's Name Fumikazu Mizutani  
4th Author's Affiliation Mitsucishi Chemical Corporation (Mitsubishi Chem.)
5th Author's Name Makoto Hara  
5th Author's Affiliation Osaka University (Osaka Univ.)
6th Author's Name Hidemitsu Aoki  
6th Author's Affiliation Osaka University (Osaka Univ.)
7th Author's Name Chiharu Kimura  
7th Author's Affiliation Osaka University (Osaka Univ.)
8th Author's Name Takashi Sugino  
8th Author's Affiliation Osaka University (Osaka Univ.)
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Date Time 2009-06-11 13:25:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-36 
Volume (vol) vol.109 
Number (no) no.81 
Page pp.1-6 
#Pages
Date of Issue 2009-06-04 (ED) 


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