Paper Abstract and Keywords |
Presentation |
2009-06-11 13:25
Evaluation of Cu-Inhibitor Residue for Post Cu-CMP Cleaning Atsushi Ito, Ken Harada, Yasuhiro Kawase, Fumikazu Mizutani (Mitsubishi Chem.), Makoto Hara, Hidemitsu Aoki, Chiharu Kimura, Takashi Sugino (Osaka Univ.) ED2009-36 Link to ES Tech. Rep. Archives: ED2009-36 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 109, no. 81, ED2009-36, pp. 1-6, June 2009. |
Paper # |
ED2009-36 |
Date of Issue |
2009-06-04 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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ED2009-36 Link to ES Tech. Rep. Archives: ED2009-36 |
Conference Information |
Committee |
ED |
Conference Date |
2009-06-11 - 2009-06-12 |
Place (in Japanese) |
(See Japanese page) |
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Paper Information |
Registration To |
ED |
Conference Code |
2009-06-ED |
Language |
Japanese |
Title (in Japanese) |
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Title (in English) |
Evaluation of Cu-Inhibitor Residue for Post Cu-CMP Cleaning |
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1st Author's Name |
Atsushi Ito |
1st Author's Affiliation |
Mitsucishi Chemical Corporation (Mitsubishi Chem.) |
2nd Author's Name |
Ken Harada |
2nd Author's Affiliation |
Mitsucishi Chemical Corporation (Mitsubishi Chem.) |
3rd Author's Name |
Yasuhiro Kawase |
3rd Author's Affiliation |
Mitsucishi Chemical Corporation (Mitsubishi Chem.) |
4th Author's Name |
Fumikazu Mizutani |
4th Author's Affiliation |
Mitsucishi Chemical Corporation (Mitsubishi Chem.) |
5th Author's Name |
Makoto Hara |
5th Author's Affiliation |
Osaka University (Osaka Univ.) |
6th Author's Name |
Hidemitsu Aoki |
6th Author's Affiliation |
Osaka University (Osaka Univ.) |
7th Author's Name |
Chiharu Kimura |
7th Author's Affiliation |
Osaka University (Osaka Univ.) |
8th Author's Name |
Takashi Sugino |
8th Author's Affiliation |
Osaka University (Osaka Univ.) |
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Speaker |
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Date Time |
2009-06-11 13:25:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2009-36 |
Volume (vol) |
vol.109 |
Number (no) |
no.81 |
Page |
pp.1-6 |
#Pages |
6 |
Date of Issue |
2009-06-04 (ED) |
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