Paper Abstract and Keywords |
Presentation |
2009-05-14 15:25
Preparation of TiO2 thin films by RF magnetron sputtering method and their photocatalytic properties Tatsuya Ito, Tatsuya Endo, Masaaki Isai (Shizuoka Univ.), Tetsuya Sakai, Yoichi Hoshi (Tokyo Polytech. Univ.) ED2009-22 CPM2009-12 SDM2009-12 Link to ES Tech. Rep. Archives: ED2009-22 CPM2009-12 SDM2009-12 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Low-temperature preparation of the TiO2 thin films was examined by using a RF magnetron sputtering method was examined. The thin film generated with the RF magnetron sputtering method. TiO2 films of anatase structure could be prepared on the non-heated glass substrates. The photocatalytic properties of films were significant in the films prepared under the sputtering atmosphere of 10 Pa rather than 5 Pa. For the organic matter resolution characteristic, both anatase and rutile crystal structures showed high activities. For the optical excitation hydrophilicity characteristic, the anatase crystal was decent. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
TiO2 thin film / RF magnetron sputtering / Photocatalyst / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 24, CPM2009-12, pp. 21-24, May 2009. |
Paper # |
CPM2009-12 |
Date of Issue |
2009-05-07 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2009-22 CPM2009-12 SDM2009-12 Link to ES Tech. Rep. Archives: ED2009-22 CPM2009-12 SDM2009-12 |
Conference Information |
Committee |
ED CPM SDM |
Conference Date |
2009-05-14 - 2009-05-15 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Satellite Office, Toyohashi Univ. of Technology |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Crystal growth, evaluation and device (Compound, Si, SiGe, Electronic and light emitting materials) |
Paper Information |
Registration To |
CPM |
Conference Code |
2009-05-ED-CPM-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Preparation of TiO2 thin films by RF magnetron sputtering method and their photocatalytic properties |
Sub Title (in English) |
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Keyword(1) |
TiO2 thin film |
Keyword(2) |
RF magnetron sputtering |
Keyword(3) |
Photocatalyst |
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1st Author's Name |
Tatsuya Ito |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
2nd Author's Name |
Tatsuya Endo |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
3rd Author's Name |
Masaaki Isai |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
4th Author's Name |
Tetsuya Sakai |
4th Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytech. Univ.) |
5th Author's Name |
Yoichi Hoshi |
5th Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytech. Univ.) |
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Speaker |
Author-1 |
Date Time |
2009-05-14 15:25:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
ED2009-22, CPM2009-12, SDM2009-12 |
Volume (vol) |
vol.109 |
Number (no) |
no.23(ED), no.24(CPM), no.25(SDM) |
Page |
pp.21-24 |
#Pages |
4 |
Date of Issue |
2009-05-07 (ED, CPM, SDM) |
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