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Paper Abstract and Keywords
Presentation 2009-04-17 16:00
MEMS Mirror Array Module for Wavelength Selective Switches (WSS)
Mitsuo Usui, Shingo Uchiyama, Etsu Hashimoto, Koichi Hadama, Yuzo Ishii, Nobuaki Matsuura, Tomomi Sakata, Nobuhiro Shimoyama, Tohru Matsuura, Fusao Shimokawa (NTT Corp.) R2009-7 CPM2009-7 OPE2009-7 Link to ES Tech. Rep. Archives: CPM2009-7 OPE2009-7
Abstract (in Japanese) (See Japanese page) 
(in English) We developed a new two-axis microelectromechanical-systems (MEMS) mirror array module for wavelength selective switches (WSS). This MEMS mirror array module has a suitable structure for narrow-pitch and high fill-factor. We designed a new electrode structure to reduce electric interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small sealing package and a high density, flexible, electrical interface. We fabricated a 50ch-MEMS mirror array module using these technologies, and confirmed that the module has good characteristics. We also confirmed the electric interference reduction in the fabricated MEMS mirror array module.
Keyword (in Japanese) (See Japanese page) 
(in English) Wavelength Selective Switches (WSS) / MEMS / Mirror Array / Electrical Interference / Packaging Technology / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 8, OPE2009-7, pp. 35-39, April 2009.
Paper # OPE2009-7 
Date of Issue 2009-04-10 (R, CPM, OPE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF R2009-7 CPM2009-7 OPE2009-7 Link to ES Tech. Rep. Archives: CPM2009-7 OPE2009-7

Conference Information
Committee OPE CPM R  
Conference Date 2009-04-17 - 2009-04-17 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OPE 
Conference Code 2009-04-OPE-CPM-R 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) MEMS Mirror Array Module for Wavelength Selective Switches (WSS) 
Sub Title (in English)  
Keyword(1) Wavelength Selective Switches (WSS)  
Keyword(2) MEMS  
Keyword(3) Mirror Array  
Keyword(4) Electrical Interference  
Keyword(5) Packaging Technology  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Mitsuo Usui  
1st Author's Affiliation NTT Corporation. (NTT Corp.)
2nd Author's Name Shingo Uchiyama  
2nd Author's Affiliation NTT Corporation. (NTT Corp.)
3rd Author's Name Etsu Hashimoto  
3rd Author's Affiliation NTT Corporation. (NTT Corp.)
4th Author's Name Koichi Hadama  
4th Author's Affiliation NTT Corporation. (NTT Corp.)
5th Author's Name Yuzo Ishii  
5th Author's Affiliation NTT Corporation. (NTT Corp.)
6th Author's Name Nobuaki Matsuura  
6th Author's Affiliation NTT Corporation. (NTT Corp.)
7th Author's Name Tomomi Sakata  
7th Author's Affiliation NTT Corporation. (NTT Corp.)
8th Author's Name Nobuhiro Shimoyama  
8th Author's Affiliation NTT Corporation. (NTT Corp.)
9th Author's Name Tohru Matsuura  
9th Author's Affiliation NTT Corporation. (NTT Corp.)
10th Author's Name Fusao Shimokawa  
10th Author's Affiliation NTT Corporation. (NTT Corp.)
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Speaker
Date Time 2009-04-17 16:00:00 
Presentation Time 25 
Registration for OPE 
Paper # IEICE-R2009-7,IEICE-CPM2009-7,IEICE-OPE2009-7 
Volume (vol) IEICE-109 
Number (no) no.6(R), no.7(CPM), no.8(OPE) 
Page pp.35-39 
#Pages IEICE-5 
Date of Issue IEICE-R-2009-04-10,IEICE-CPM-2009-04-10,IEICE-OPE-2009-04-10 


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