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| Presentation | 2009-02-26 15:40 Feild Emitter Arrays with focusing function and it's applications Yoichiro Neo, Masafumi Takeda, Tomoya Tagami, Syun Horie, Toru Aoki, Hidenori Mimura (Shizuoka Univ.), Tomoya Yoshida, Masayoshi Nagao, Seigo Kanemaru (National Inst.of Adv Ind Scie and Tech.)  ED2008-228 SDM2008-220 Link to ES Tech. Rep. Archives: ED2008-228 SDM2008-220 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have developed field emission array (FEA) with new focusing electrode structure and proposed several devices and applications using FEA. In order to realize a fine defined field emission display (FED), optimized volcano- structured double-gated FEA was fabricated and focusing characteristics was successfully confirmed. By using volcano-structured double-gated FEA, high frequency vacuum tubes, X-ray imaging tube and excimer lamp were newly proposed and estimated. Further more, highly performed focusing characteristics is needed for the applications using crossover electron beam, such as electron beam microscope and electron beam lithography. The Quad-gated FEA, which equipped an einzel lens just in front of extractor electrode, was fabricated and estimated. It was shown by simulations that the emitted electron beam made a crossover. These results promised new devices and application using FEA. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | field emission array / field emission display / einzel lens / electron beam microscope / electron beam lithography / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 438, SDM2008-220, pp. 23-27, Feb. 2009. | |
| Paper # | SDM2008-220 | |
| Date of Issue | 2009-02-19 (ED, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2008-228 SDM2008-220 Link to ES Tech. Rep. Archives: ED2008-228 SDM2008-220 |
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| Conference Information | |
| Committee | SDM ED |
| Conference Date | 2009-02-26 - 2009-02-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Functional nanodevices and related technologies |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2009-02-SDM-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Feild Emitter Arrays with focusing function and it's applications |
| Sub Title (in English) | |
| Keyword(1) | field emission array |
| Keyword(2) | field emission display |
| Keyword(3) | einzel lens |
| Keyword(4) | electron beam microscope |
| Keyword(5) | electron beam lithography |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yoichiro Neo |
| 1st Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name | Masafumi Takeda |
| 2nd Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name | Tomoya Tagami |
| 3rd Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name | Syun Horie |
| 4th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name | Toru Aoki |
| 5th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name | Hidenori Mimura |
| 6th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 7th Author's Name | Tomoya Yoshida |
| 7th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (National Inst.of Adv Ind Scie and Tech.) |
| 8th Author's Name | Masayoshi Nagao |
| 8th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (National Inst.of Adv Ind Scie and Tech.) |
| 9th Author's Name | Seigo Kanemaru |
| 9th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (National Inst.of Adv Ind Scie and Tech.) |
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| Speaker | Author-1 |
| Date Time | 2009-02-26 15:40:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | ED2008-228, SDM2008-220 |
| Volume (vol) | vol.108 |
| Number (no) | no.437(ED), no.438(SDM) |
| Page | pp.23-27 |
| #Pages | 5 |
| Date of Issue | 2009-02-19 (ED, SDM) |
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