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| Presentation | 2009-02-26 13:30 [Invited Talk] Epitaxial Graphene Grown on Si Substrate and Its Applications to Electron Devices Taiichi Otsuji, Tetsuya Suemitsu, Hyon-Choru Kang, Hiromi Karasawa, Yuu Miyamoto, Hiroyuki Handa, Maki Suemitsu (Tohoku Univ.), Eiichi Sano (Hokkaido Univ.), Maxim Ryzhii, Victor Ryzhii (Univ. of Aizu)  ED2008-224 SDM2008-216 Link to ES Tech. Rep. Archives: ED2008-224 SDM2008-216 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | This paper reviews recent advances in graphene material epitaxially grown on Si substrate and its applications to electron devices. Exfoliation from highly-oriented pyrolitic graphite and surface decomposition of epitaxial SiC are well-known as graphene formation technologies. However, when it is introduced to the post-CMOS VLSIs as the key material, introduction of Si substrate as the starting material as well as practically low-temperature, reproducible growth technology are mandatory. To cope with those issues we developed “graphene-on-silicon” material growth technology consisting of epitaxial growth of 3C-SiC onto Si substrate using organo-silan gas-source MBE and surface decomposition processes. By utilizing such a new GOS material to form the channel with graphene, we succeeded in the transistor operation. This is the first step ahead; we have recognized existing subjects for ultra-high performance, mass-productive device fabrication. The exceptional electronic properties of graphene can devise wide variety of new devices including plasmonic devices and terahertz lasers which will also be described. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | graphene / epitaxial growth / silicon / FET / CMOS / terahertz / laser / | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 437, ED2008-224, pp. 1-6, Feb. 2009. | |
| Paper # | ED2008-224 | |
| Date of Issue | 2009-02-19 (ED, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2008-224 SDM2008-216 Link to ES Tech. Rep. Archives: ED2008-224 SDM2008-216 |
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| Conference Information | |
| Committee | SDM ED |
| Conference Date | 2009-02-26 - 2009-02-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Functional nanodevices and related technologies |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2009-02-SDM-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Epitaxial Graphene Grown on Si Substrate and Its Applications to Electron Devices |
| Sub Title (in English) | |
| Keyword(1) | graphene |
| Keyword(2) | epitaxial growth |
| Keyword(3) | silicon |
| Keyword(4) | FET |
| Keyword(5) | CMOS |
| Keyword(6) | terahertz |
| Keyword(7) | laser |
| Keyword(8) | |
| 1st Author's Name | Taiichi Otsuji |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Tetsuya Suemitsu |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Hyon-Choru Kang |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Hiromi Karasawa |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Yuu Miyamoto |
| 5th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 6th Author's Name | Hiroyuki Handa |
| 6th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 7th Author's Name | Maki Suemitsu |
| 7th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 8th Author's Name | Eiichi Sano |
| 8th Author's Affiliation | Hokkaido University (Hokkaido Univ.) |
| 9th Author's Name | Maxim Ryzhii |
| 9th Author's Affiliation | University of Aizu (Univ. of Aizu) |
| 10th Author's Name | Victor Ryzhii |
| 10th Author's Affiliation | University of Aizu (Univ. of Aizu) |
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| Speaker | Author-1 |
| Date Time | 2009-02-26 13:30:00 |
| Presentation Time | 40 minutes |
| Registration for | ED |
| Paper # | ED2008-224, SDM2008-216 |
| Volume (vol) | vol.108 |
| Number (no) | no.437(ED), no.438(SDM) |
| Page | pp.1-6 |
| #Pages | 6 |
| Date of Issue | 2009-02-19 (ED, SDM) |
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