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| Presentation | 2008-12-19 15:45 InGaAs MSM waveguide-photodetector integrated on Si wire Kazuya Ohira, Nobuo Suzuki, Mizunori Ezaki (Toshiba)  OPE2008-142 Link to ES Tech. Rep. Archives: OPE2008-142 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | InGaAs MSM waveguide-photodetector is proposed and its fundamental device characteristics are reported. InGaAs absorption layer is directly bonded to Si waveguide with direct wafer bonding technology. Input optical signals propagated in Si waveguide are coupled to in the InGaAs layer with evanescent coupling. The direct wafer bonding of waveguide and absorption layers enables higher coupling efficiency by adopting MSM (metal-semiconductor-metal) structure, easy fabrication of electrodes and high-speed response is expected. Theoretical investigation shows the device can realize quantum efficiency of over 80% with 10-$\mu$m length and 2-$\mu$m width, which is smaller area compared with conventional devices. Fabricated device integrated on Si waveguide shows fundamental operation for 1.55 $\mu$m wavelength. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Optical interconnection / photo-detector / Si waveguide / Si photonics / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 370, OPE2008-142, pp. 31-33, Dec. 2008. | |
| Paper # | OPE2008-142 | |
| Date of Issue | 2008-12-12 (OPE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OPE2008-142 Link to ES Tech. Rep. Archives: OPE2008-142 |
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| Conference Information | |
| Committee | OPE |
| Conference Date | 2008-12-19 - 2008-12-19 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Optical passive components(optical filter, conector, MEMS), Si photonics, Optical fiber, etc |
| Paper Information | |
| Registration To | OPE |
| Conference Code | 2008-12-OPE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | InGaAs MSM waveguide-photodetector integrated on Si wire |
| Sub Title (in English) | |
| Keyword(1) | Optical interconnection |
| Keyword(2) | photo-detector |
| Keyword(3) | Si waveguide |
| Keyword(4) | Si photonics |
| Keyword(5) | |
| Keyword(6) | |
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| Keyword(8) | |
| 1st Author's Name | Kazuya Ohira |
| 1st Author's Affiliation | Toshiba (Toshiba) |
| 2nd Author's Name | Nobuo Suzuki |
| 2nd Author's Affiliation | Toshiba (Toshiba) |
| 3rd Author's Name | Mizunori Ezaki |
| 3rd Author's Affiliation | Toshiba (Toshiba) |
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| Speaker | Author-1 |
| Date Time | 2008-12-19 15:45:00 |
| Presentation Time | 25 minutes |
| Registration for | OPE |
| Paper # | OPE2008-142 |
| Volume (vol) | vol.108 |
| Number (no) | no.370 |
| Page | pp.31-33 |
| #Pages | 3 |
| Date of Issue | 2008-12-12 (OPE) |
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