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| Presentation | 2008-12-05 13:15 [Invited Talk] Mechanisms of Effective Work Function Modulation of Metal/Hf-based High-k Gate Stacks Heiji Watanabe, Yuki Kita, Takuji Hosoi, Takayoshi Shimura (Osaka Univ.), Kenji Shiraishi (Univ. of Tsukuba), Yasuo Nara (SELETE), Keisaku Yamada (Waseda Univ.)  SDM2008-188 Link to ES Tech. Rep. Archives: SDM2008-188 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 335, SDM2008-188, pp. 21-25, Dec. 2008. | |
| Paper # | SDM2008-188 | |
| Date of Issue | 2008-11-28 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2008-188 Link to ES Tech. Rep. Archives: SDM2008-188 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2008-12-05 - 2008-12-05 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kyoto University, Katsura Campus, A1-001 |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Fabrication and Characterization of Si and Si-related Materials and Devices |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2008-12-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mechanisms of Effective Work Function Modulation of Metal/Hf-based High-k Gate Stacks |
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| 1st Author's Name | Heiji Watanabe |
| 1st Author's Affiliation | Osaka University (Osaka Univ.) |
| 2nd Author's Name | Yuki Kita |
| 2nd Author's Affiliation | Osaka University (Osaka Univ.) |
| 3rd Author's Name | Takuji Hosoi |
| 3rd Author's Affiliation | Osaka University (Osaka Univ.) |
| 4th Author's Name | Takayoshi Shimura |
| 4th Author's Affiliation | Osaka University (Osaka Univ.) |
| 5th Author's Name | Kenji Shiraishi |
| 5th Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 6th Author's Name | Yasuo Nara |
| 6th Author's Affiliation | Semiconductor Leading Edge Technologies Inc. (SELETE) |
| 7th Author's Name | Keisaku Yamada |
| 7th Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2008-12-05 13:15:00 |
| Presentation Time | 35 minutes |
| Registration for | SDM |
| Paper # | SDM2008-188 |
| Volume (vol) | vol.108 |
| Number (no) | no.335 |
| Page | pp.21-25 |
| #Pages | 5 |
| Date of Issue | 2008-11-28 (SDM) |
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