Paper Abstract and Keywords |
Presentation |
2008-10-31 11:45
Structure and photocatalytic properties of TiO2 films depopsited by high rate reactive sputtering. Yoichi Hoshi, Taiki Ishihara, Tetsuya Sakai, Hao Lei (Tokyo Polytechnio Univ.), Hidehiko Shimizu (Niigata Univ.) CPM2008-88 Link to ES Tech. Rep. Archives: CPM2008-88 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We reported that reactive sputtering by using two sputtering sources, one for the supply of Ti atoms and another for the supply of oxygen radicals was useful for the deposition of TiO2 films at high rate above 20nm/min. In this work, structure and photocatalytic properties of the TiO2 films deposited by the method were investigated. The film structure could be controlled by controlling the supply ratio RO/RTi of oxygen molecules and titanium atoms to the substrate, and single phase anatase film was obtained at the supply ratio above 280. The films deposited in this study showed super hydrophilicity by the irradiation of ultraviolet rays, although the hydrophilicity were improved by the increase of the anatase phase in the film.
Keyword TiO2,Thin film, reactive sputter, high rate deposition, Photocatalytic film |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
TiO2 / Thin film / reactive sputter / high rate deposition / photo-catalytic film / / / |
Reference Info. |
IEICE Tech. Rep., vol. 108, no. 269, CPM2008-88, pp. 75-79, Oct. 2008. |
Paper # |
CPM2008-88 |
Date of Issue |
2008-10-23 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2008-88 Link to ES Tech. Rep. Archives: CPM2008-88 |
Conference Information |
Committee |
CPM |
Conference Date |
2008-10-30 - 2008-10-31 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Niigata Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Process of Thin Film formation and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2008-10-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Structure and photocatalytic properties of TiO2 films depopsited by high rate reactive sputtering. |
Sub Title (in English) |
|
Keyword(1) |
TiO2 |
Keyword(2) |
Thin film |
Keyword(3) |
reactive sputter |
Keyword(4) |
high rate deposition |
Keyword(5) |
photo-catalytic film |
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Yoichi Hoshi |
1st Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytechnio Univ.) |
2nd Author's Name |
Taiki Ishihara |
2nd Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytechnio Univ.) |
3rd Author's Name |
Tetsuya Sakai |
3rd Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytechnio Univ.) |
4th Author's Name |
Hao Lei |
4th Author's Affiliation |
Tokyo Polytechnic University (Tokyo Polytechnio Univ.) |
5th Author's Name |
Hidehiko Shimizu |
5th Author's Affiliation |
Niigata University (Niigata Univ.) |
6th Author's Name |
|
6th Author's Affiliation |
() |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2008-10-31 11:45:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2008-88 |
Volume (vol) |
vol.108 |
Number (no) |
no.269 |
Page |
pp.75-79 |
#Pages |
4 |
Date of Issue |
2008-10-23 (CPM) |
|