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| Presentation | 2008-10-30 14:30 Lowering the resistivity of Al dope ZnO films deposited by a magnetron sputtering with a third electrode Yutaka Oshima, Yuichiro Makino (nagaoka Univ. of Tech.), Hironori Katagiri, Kazuo Jinbo (Nagaoka National College of Tech,), Yuichiro Kuroki, Kanji Yasui, Masasuke Takata, Tadashi Akahane (nagaoka Univ. of Tech.)  CPM2008-78 Link to ES Tech. Rep. Archives: CPM2008-78 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Improvement of the uniformity in the resistivity of Al doped ZnO (AZO) films has been obtained using a radio frequency (rf) magnetron sputtering with a third electrode. In order to further lower the resistivity of the AZO films, hydrogen doping by the hydrogen plasma annealing was investigated. As a result, the electron density increased. Hall mobility also increased perhaps due to the reduction of the adsorbed oxygen on the grain boundary by the hydrogen annealing. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | AZO / rf magnetron sputtering / third electrode / hydrogen plasma annealing / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 269, CPM2008-78, pp. 19-22, Oct. 2008. | |
| Paper # | CPM2008-78 | |
| Date of Issue | 2008-10-23 (CPM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | CPM2008-78 Link to ES Tech. Rep. Archives: CPM2008-78 |
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| Conference Information | |
| Committee | CPM |
| Conference Date | 2008-10-30 - 2008-10-31 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niigata Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process of Thin Film formation and Materials, etc. |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2008-10-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lowering the resistivity of Al dope ZnO films deposited by a magnetron sputtering with a third electrode |
| Sub Title (in English) | |
| Keyword(1) | AZO |
| Keyword(2) | rf magnetron sputtering |
| Keyword(3) | third electrode |
| Keyword(4) | hydrogen plasma annealing |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yutaka Oshima |
| 1st Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
| 2nd Author's Name | Yuichiro Makino |
| 2nd Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
| 3rd Author's Name | Hironori Katagiri |
| 3rd Author's Affiliation | Nagaoka National College of Technology (Nagaoka National College of Tech,) |
| 4th Author's Name | Kazuo Jinbo |
| 4th Author's Affiliation | Nagaoka National College of Technology (Nagaoka National College of Tech,) |
| 5th Author's Name | Yuichiro Kuroki |
| 5th Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
| 6th Author's Name | Kanji Yasui |
| 6th Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
| 7th Author's Name | Masasuke Takata |
| 7th Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
| 8th Author's Name | Tadashi Akahane |
| 8th Author's Affiliation | Nagaoka University of Technology (nagaoka Univ. of Tech.) |
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| Speaker | Author-1 |
| Date Time | 2008-10-30 14:30:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | CPM2008-78 |
| Volume (vol) | vol.108 |
| Number (no) | no.269 |
| Page | pp.19-22 |
| #Pages | 4 |
| Date of Issue | 2008-10-23 (CPM) |
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