Paper Abstract and Keywords |
Presentation |
2008-10-10 16:15
Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy Tomoyuki Suwa (Tohoku Univ.), Takashi Aratani (Shin-Etsu Chemi.), Masaaki Higuchi (Toshiba), Shigetoshi Sugawa (Tohoku Univ.), Eiji Ikenaga (JASRI), Jiro Ushio (Hitachi), Hiroshi Nohira (Musashi Inst. of Tech.), Akinobu Teramoto, Tadahiro Ohmi, Takeo Hattori (Tohoku Univ.) SDM2008-167 Link to ES Tech. Rep. Archives: SDM2008-167 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Soft x-ray-excited angle-resolved photoemission results for nitride films formed using nitrogen-hydrogen radicals on Si(100), Si(111), and Si(110) are reported. The data were obtained using synchrotron radiation which allowed the Si 2p, N 1s, and O 1s levels to be investigated with the same probing depth. The following main results were obtained: 1) The $Si_3$$N_4$ film is covered with one monolayer of Si-$(OH)_3$N. Its areal density is 15% smaller on Si(111) than on Si(100) and Si (110), 2) the $Si_3$$N_4$/Si interfaces on all three surfaces are compositionally abrupt. This conclusion is based on the observation that no Si atoms bonded with three N atoms and one Si atom were detected, 3) The observation that the number of Si-H bonds at the $Si_3$$N_4$/Si(110) interface is 38~53% larger than those at the $Si_3$$N_4$/Si(100) and $Si_3$$N_4$/Si(111) interfaces indicates a dependence of the interface structure on the orientation of the substrate. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Silicon nitride film / nitrogen-hydrogen radical / Soft x-ray-excited angle-resolved photoemission / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 108, no. 236, SDM2008-167, pp. 69-74, Oct. 2008. |
Paper # |
SDM2008-167 |
Date of Issue |
2008-10-02 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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SDM2008-167 Link to ES Tech. Rep. Archives: SDM2008-167 |
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