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Paper Abstract and Keywords
Presentation 2008-05-30 14:30
Evaluation of TiO2-SiO2 Ultra-Low-Expansion Glass Fabricated by the Soot Method Using the Line-Focus-Beam Ultrasonic Material Characterization System
Jun-ichi Kushibiki, Mototaka Arakawa (Tohoku Univ.), Tetsuji Ueda, Akira Fujinoki (Shin-Etsu Quartz) US2008-12
Abstract (in Japanese) (See Japanese page) 
(in English) In this paper, we tried to fabricate a TiO2-doped SiO2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.
Keyword (in Japanese) (See Japanese page) 
(in English) Line-focus-beam ultrasonic material characterization system / Velocity measurement / Leaky surface acoustic waves / TiO2-SiO2 ultra-low-expansion glass / CTE evaluation / EUVL system / Homogenization process / Fictive temperature  
Reference Info. IEICE Tech. Rep., vol. 108, no. 73, US2008-12, pp. 11-16, May 2008.
Paper # US2008-12 
Date of Issue 2008-05-23 (US) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2008-05-30 - 2008-05-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2008-05-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of TiO2-SiO2 Ultra-Low-Expansion Glass Fabricated by the Soot Method Using the Line-Focus-Beam Ultrasonic Material Characterization System 
Sub Title (in English)  
Keyword(1) Line-focus-beam ultrasonic material characterization system  
Keyword(2) Velocity measurement  
Keyword(3) Leaky surface acoustic waves  
Keyword(4) TiO2-SiO2 ultra-low-expansion glass  
Keyword(5) CTE evaluation  
Keyword(6) EUVL system  
Keyword(7) Homogenization process  
Keyword(8) Fictive temperature  
1st Author's Name Jun-ichi Kushibiki  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Mototaka Arakawa  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Tetsuji Ueda  
3rd Author's Affiliation Shin-Etsu Quartz Products Co., Ltd. (Shin-Etsu Quartz)
4th Author's Name Akira Fujinoki  
4th Author's Affiliation Shin-Etsu Quartz Products Co., Ltd. (Shin-Etsu Quartz)
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Speaker
Date Time 2008-05-30 14:30:00 
Presentation Time 30 
Registration for US 
Paper # IEICE-US2008-12 
Volume (vol) IEICE-108 
Number (no) no.73 
Page pp.11-16 
#Pages IEICE-6 
Date of Issue IEICE-US-2008-05-23 


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