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| Presentation | 2008-05-30 14:30 Evaluation of TiO2-SiO2 Ultra-Low-Expansion Glass Fabricated by the Soot Method Using the Line-Focus-Beam Ultrasonic Material Characterization System Jun-ichi Kushibiki, Mototaka Arakawa (Tohoku Univ.), Tetsuji Ueda, Akira Fujinoki (Shin-Etsu Quartz)  US2008-12 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In this paper, we tried to fabricate a TiO2-doped SiO2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Line-focus-beam ultrasonic material characterization system / Velocity measurement / Leaky surface acoustic waves / TiO2-SiO2 ultra-low-expansion glass / CTE evaluation / EUVL system / Homogenization process / Fictive temperature | |
| Reference Info. | IEICE Tech. Rep., vol. 108, no. 73, US2008-12, pp. 11-16, May 2008. | |
| Paper # | US2008-12 | |
| Date of Issue | 2008-05-23 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2008-12 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2008-05-30 - 2008-05-30 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2008-05-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of TiO2-SiO2 Ultra-Low-Expansion Glass Fabricated by the Soot Method Using the Line-Focus-Beam Ultrasonic Material Characterization System |
| Sub Title (in English) | |
| Keyword(1) | Line-focus-beam ultrasonic material characterization system |
| Keyword(2) | Velocity measurement |
| Keyword(3) | Leaky surface acoustic waves |
| Keyword(4) | TiO2-SiO2 ultra-low-expansion glass |
| Keyword(5) | CTE evaluation |
| Keyword(6) | EUVL system |
| Keyword(7) | Homogenization process |
| Keyword(8) | Fictive temperature |
| 1st Author's Name | Jun-ichi Kushibiki |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Mototaka Arakawa |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Tetsuji Ueda |
| 3rd Author's Affiliation | Shin-Etsu Quartz Products Co., Ltd. (Shin-Etsu Quartz) |
| 4th Author's Name | Akira Fujinoki |
| 4th Author's Affiliation | Shin-Etsu Quartz Products Co., Ltd. (Shin-Etsu Quartz) |
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| Speaker | 2 |
| Date Time | 2008-05-30 14:30:00 |
| Presentation Time | 30 |
| Registration for | US |
| Paper # | IEICE-US2008-12 |
| Volume (vol) | IEICE-108 |
| Number (no) | no.73 |
| Page | pp.11-16 |
| #Pages | IEICE-6 |
| Date of Issue | IEICE-US-2008-05-23 |
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