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Paper Abstract and Keywords
Presentation 2008-04-17 13:05
[Invited Talk] Embedded DRAM Technology for Consumer Electronics
Hiroki Shirai, Ryousuke Ishikawa, Yuichi Itoh, Takuya Kitamura, Mami Takeuchi, Takashi Sakoh, Ken Inoue, Tohru Kawasaki, Nobuyuki Katsuki, Hiroyuki Hoshizaki, Shinichi Kuwabara, Hidetaka Natsume, Masato Sakao, Takaho Tanigawa (NEC Electronics) ICD2008-4 Link to ES Tech. Rep. Archives: ICD2008-4
Abstract (in Japanese) (See Japanese page) 
(in English) This paper presents embedded DRAM device technology utilizing stacked MIM(Metal-Insulator-Metal) capacitor. Targeted for high random-access performance as well as low-power data-streaming applications, original structure named “Full Metal DRAM” has been devised and implemented from 150nm generation. This features reduced parasitic resistance of DRAM cell and fully-compatible CMOS Trs. characteristics with that of leading-edge CMOS. In 90nm generation, ZrO2 is introduced as capacitor dielectric material for cell size reduction. For the next generation of 55nm and beyond, high-k gate dielectric (HfSiON) has been introduced in CMOS platform, which can be effectively exploited for embedded DRAM scaling and performance improvement.
Keyword (in Japanese) (See Japanese page) 
(in English) embedded DRAM / MIM Capacitor / High-k / ZrO2 / HfSiON / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 6, ICD2008-4, pp. 19-24, April 2008.
Paper # ICD2008-4 
Date of Issue 2008-04-10 (ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2008-4 Link to ES Tech. Rep. Archives: ICD2008-4

Conference Information
Committee ICD  
Conference Date 2008-04-17 - 2008-04-18 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ICD 
Conference Code 2008-04-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Embedded DRAM Technology for Consumer Electronics 
Sub Title (in English)  
Keyword(1) embedded DRAM  
Keyword(2) MIM Capacitor  
Keyword(3) High-k  
Keyword(4) ZrO2  
Keyword(5) HfSiON  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Shirai  
1st Author's Affiliation NEC Electronics Corporation (NEC Electronics)
2nd Author's Name Ryousuke Ishikawa  
2nd Author's Affiliation NEC Electronics Corporation (NEC Electronics)
3rd Author's Name Yuichi Itoh  
3rd Author's Affiliation NEC Electronics Corporation (NEC Electronics)
4th Author's Name Takuya Kitamura  
4th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
5th Author's Name Mami Takeuchi  
5th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
6th Author's Name Takashi Sakoh  
6th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
7th Author's Name Ken Inoue  
7th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
8th Author's Name Tohru Kawasaki  
8th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
9th Author's Name Nobuyuki Katsuki  
9th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
10th Author's Name Hiroyuki Hoshizaki  
10th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
11th Author's Name Shinichi Kuwabara  
11th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
12th Author's Name Hidetaka Natsume  
12th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
13th Author's Name Masato Sakao  
13th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
14th Author's Name Takaho Tanigawa  
14th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
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Speaker Author-1 
Date Time 2008-04-17 13:05:00 
Presentation Time 50 minutes 
Registration for ICD 
Paper # ICD2008-4 
Volume (vol) vol.108 
Number (no) no.6 
Page pp.19-24 
#Pages
Date of Issue 2008-04-10 (ICD) 


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