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Paper Abstract and Keywords
Presentation 2007-12-14 16:30
Electric-Field Drive Optical Modulator Using Si Ring Resonator
Tomohiro Tokunaga, Yuichiro Tanushi, Yoshiteru Amemiya, Shin Yokoyama (Hiroshima Univ.) Link to ES Tech. Rep. Archives: OPE2007-143
Abstract (in Japanese) (See Japanese page) 
(in English) Multimode Si ring resonators (20um in diameter and resonance wavelength of 1500nm) were fabricated on SOI wafers. The waveguide width is 0.6~1.0um, and the thickness is 0.3um. The waveguide was covered with LPCVD Si3N4 film (0.26um) deposited at 750℃ and LPCVD TEOS SiO2 film deposited at 700℃, and the mechanical stress was induced. The electric field in the vertical direction was applied to the Si waveguide through the bottom cladding layer (1um thick SiO2). The optical output from the drop port at the resonance wavelength was decreased by applied voltage. At a wavelength of 1501.6nm, the optical modulation of 30% was obtained at 200V. The resonance wavelength shift toward short wavelength side was also observed.
Keyword (in Japanese) (See Japanese page) 
(in English) Si-ring resonator / Optical modulation / Electiric-field drive / Carrier concentration modulation / LPCVD Si3N4 / / /  
Reference Info. IEICE Tech. Rep., vol. 107, no. 389, OPE2007-143, pp. 41-46, Dec. 2007.
Paper # OPE2007-143 
Date of Issue 2007-12-07 (OPE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF Link to ES Tech. Rep. Archives: OPE2007-143

Conference Information
Committee OPE  
Conference Date 2007-12-14 - 2007-12-14 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OPE 
Conference Code 2007-12-OPE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electric-Field Drive Optical Modulator Using Si Ring Resonator 
Sub Title (in English)  
Keyword(1) Si-ring resonator  
Keyword(2) Optical modulation  
Keyword(3) Electiric-field drive  
Keyword(4) Carrier concentration modulation  
Keyword(5) LPCVD Si3N4  
1st Author's Name Tomohiro Tokunaga  
1st Author's Affiliation Hiroshima University (Hiroshima Univ.)
2nd Author's Name Yuichiro Tanushi  
2nd Author's Affiliation Hiroshima University (Hiroshima Univ.)
3rd Author's Name Yoshiteru Amemiya  
3rd Author's Affiliation Hiroshima University (Hiroshima Univ.)
4th Author's Name Shin Yokoyama  
4th Author's Affiliation Hiroshima University (Hiroshima Univ.)
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Date Time 2007-12-14 16:30:00 
Presentation Time 25 
Registration for OPE 
Paper # IEICE-OPE2007-143 
Volume (vol) IEICE-107 
Number (no) no.389 
Page pp.41-46 
#Pages IEICE-6 
Date of Issue IEICE-OPE-2007-12-07 

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