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| Presentation | 2007-10-04 16:55 Modulation of Dielectric Constant on Mechanically Strained SrTiO3 MIM Capacitor Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (Tohoku Univ.)  SDM2007-179 Link to ES Tech. Rep. Archives: SDM2007-179 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The effect of tensile strain on SrTiO3 high-k insulator was discussed. The tensile strain on SrTiO3 thin films increased dielectric constant, and as a frequency became higher, the increment of dielectric constant increased. The mechanism of the tensile strain-induced capacitance increase was also discussed. The tensile strain reduced a damping of titanium-oxygen oscillator in SrTiO3 film, and titanium-oxygen dipole moment was increased. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Perovskite high-k dielectric film / SrTiO3 / Tensile strain / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 245, SDM2007-179, pp. 23-24, Oct. 2007. | |
| Paper # | SDM2007-179 | |
| Date of Issue | 2007-09-27 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2007-179 Link to ES Tech. Rep. Archives: SDM2007-179 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2007-10-04 - 2007-10-05 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and Novel Process Technologies |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2007-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Modulation of Dielectric Constant on Mechanically Strained SrTiO3 MIM Capacitor |
| Sub Title (in English) | |
| Keyword(1) | Perovskite high-k dielectric film |
| Keyword(2) | SrTiO3 |
| Keyword(3) | Tensile strain |
| Keyword(4) | |
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| Keyword(8) | |
| 1st Author's Name | Shin-Ichiro Kuroki |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Koji Kotani |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Takashi Ito |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2007-10-04 16:55:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2007-179 |
| Volume (vol) | vol.107 |
| Number (no) | no.245 |
| Page | pp.23-24 |
| #Pages | 2 |
| Date of Issue | 2007-09-27 (SDM) |
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