Paper Abstract and Keywords |
Presentation |
2007-08-10 09:15
Fabrication of the strain gauge integrated Si-diaphragm structure hydrogen gas sensor Yuta Watanabe, Sumio Okuyama, Tomochika Harada, Koichi Matsushita (Yamagata Univ.) CPM2007-44 Link to ES Tech. Rep. Archives: CPM2007-44 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We are developing a Si-diaphragm structure hydrogen gas sensor which detects the expansion of Pd thin film by the integrated strain gauge. The 2mm x 2mm x 350um silicon diaphragm was made using the p-type Si substrate by the anisotropic etching by tetramethylammnonium hydroxide (TMAH). The piezoresistance was produced by thermal diffusion of the phosphorus. In this paper, we report manufacture method and measurement result in introducing the hydrogen of the element. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
hydrogen / hydrogen gas sensor / silicon / maicromachining / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 107, no. 178, CPM2007-44, pp. 45-48, Aug. 2007. |
Paper # |
CPM2007-44 |
Date of Issue |
2007-08-02 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2007-44 Link to ES Tech. Rep. Archives: CPM2007-44 |
Conference Information |
Committee |
CPM |
Conference Date |
2007-08-09 - 2007-08-10 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Yamagata Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Electronic Component Parts and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2007-08-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Fabrication of the strain gauge integrated Si-diaphragm structure hydrogen gas sensor |
Sub Title (in English) |
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Keyword(1) |
hydrogen |
Keyword(2) |
hydrogen gas sensor |
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silicon |
Keyword(4) |
maicromachining |
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1st Author's Name |
Yuta Watanabe |
1st Author's Affiliation |
Yamagata University (Yamagata Univ.) |
2nd Author's Name |
Sumio Okuyama |
2nd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
3rd Author's Name |
Tomochika Harada |
3rd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
4th Author's Name |
Koichi Matsushita |
4th Author's Affiliation |
Yamagata University (Yamagata Univ.) |
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Speaker |
Author-1 |
Date Time |
2007-08-10 09:15:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2007-44 |
Volume (vol) |
vol.107 |
Number (no) |
no.178 |
Page |
pp.45-48 |
#Pages |
4 |
Date of Issue |
2007-08-02 (CPM) |