Paper Abstract and Keywords |
Presentation |
2007-08-10 10:55
Implementation of Temperature Controlled Tunable Capacitor using Silicon Bimetal Atsuhiro Suzuki, Tomochika Harada, Sumio Okuyama, Hiroshi Naganuma, Koichi Matsushita (Yamagata Univ.) CPM2007-47 Link to ES Tech. Rep. Archives: CPM2007-47 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Recently, miniaturization of MEMS sensors are required in integrated circuits(IC). As for a miniaturization method, it is reported that the pressure sensor is fabricated on its peripheral integrated circuits. By applying this technique to IC temperature sensors, we can achieve high-density device integration.
In this study, as a fundamental study of miniaturized IC temperature sensors fabricated on peripheral integrated circuits, we present and fabricate the temperature controlled tunable capacitor using silicon and aluminum bimetal, and evaluate the temperature capacitance characteristics. As a result, it is shown that the capacitance with tunable silicon bimetal is more remarkable increased by increase of temperature than that without it. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
silicon / bimetal / capacitor / temperature sensor / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 107, no. 178, CPM2007-47, pp. 59-64, Aug. 2007. |
Paper # |
CPM2007-47 |
Date of Issue |
2007-08-02 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2007-47 Link to ES Tech. Rep. Archives: CPM2007-47 |
Conference Information |
Committee |
CPM |
Conference Date |
2007-08-09 - 2007-08-10 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Yamagata Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Electronic Component Parts and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2007-08-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Implementation of Temperature Controlled Tunable Capacitor using Silicon Bimetal |
Sub Title (in English) |
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Keyword(1) |
silicon |
Keyword(2) |
bimetal |
Keyword(3) |
capacitor |
Keyword(4) |
temperature sensor |
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1st Author's Name |
Atsuhiro Suzuki |
1st Author's Affiliation |
Yamagata University (Yamagata Univ.) |
2nd Author's Name |
Tomochika Harada |
2nd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
3rd Author's Name |
Sumio Okuyama |
3rd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
4th Author's Name |
Hiroshi Naganuma |
4th Author's Affiliation |
Yamagata University (Yamagata Univ.) |
5th Author's Name |
Koichi Matsushita |
5th Author's Affiliation |
Yamagata University (Yamagata Univ.) |
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Speaker |
Author-1 |
Date Time |
2007-08-10 10:55:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2007-47 |
Volume (vol) |
vol.107 |
Number (no) |
no.178 |
Page |
pp.59-64 |
#Pages |
6 |
Date of Issue |
2007-08-02 (CPM) |
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