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| Paper Abstract and Keywords | ||
| Presentation | 2007-06-29 16:00 An enhancement of silicon wafer in thermooptic switches/quartz units -- A 128×128 matrix switch/Replacement of ceramic PKG sheet -- Takaya Watanabe (FT design Lab.)  EMD2007-16 CPM2007-34 OME2007-20 Link to ES Tech. Rep. Archives: EMD2007-16 CPM2007-34 OME2007-20 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Optoelectric devices are made based on the semiconductor processing technology. Especially, the enhancement of the use of the large diameter silicon wafer on the material is measured in the precision engineering on the cost and there are advantages of no be known in optical devices and the crystal units. The feasibility of a 128×128 matrix thermooptic optical switch is examined on silicon size 200mm×140mm. Additionally, the possibility of the application of the quartz unit of 1ｍ? or less in the mounting area and the crystal oscillator is examined in the Φ300mm silicon wafer aiming at the replacement of ceramic PKG it by the sheet method that has been put to practical use now. |
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| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | quartz units / homo-epitaxial growth quartz thin film / Φ300mm silicon wafer / silica-based thermooptic / 128×128 matrix optical switch / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 122, CPM2007-34, pp. 21-26, June 2007. | |
| Paper # | CPM2007-34 | |
| Date of Issue | 2007-06-22 (EMD, CPM, OME) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EMD2007-16 CPM2007-34 OME2007-20 Link to ES Tech. Rep. Archives: EMD2007-16 CPM2007-34 OME2007-20 |
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| Conference Information | |
| Committee | EMD CPM OME |
| Conference Date | 2007-06-29 - 2007-06-29 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | ES Summer Meeting of Materials and Devices |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2007-06-EMD-CPM-OME |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An enhancement of silicon wafer in thermooptic switches/quartz units |
| Sub Title (in English) | A 128×128 matrix switch/Replacement of ceramic PKG sheet |
| Keyword(1) | quartz units |
| Keyword(2) | homo-epitaxial growth quartz thin film |
| Keyword(3) | Φ300mm silicon wafer |
| Keyword(4) | silica-based thermooptic |
| Keyword(5) | 128×128 matrix optical switch |
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| 1st Author's Name | Takaya Watanabe |
| 1st Author's Affiliation | FT Design Lab. (FT design Lab.) |
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| Speaker | Author-1 |
| Date Time | 2007-06-29 16:00:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | EMD2007-16, CPM2007-34, OME2007-20 |
| Volume (vol) | vol.107 |
| Number (no) | no.121(EMD), no.122(CPM), no.123(OME) |
| Page | pp.21-26 |
| #Pages | 6 |
| Date of Issue | 2007-06-22 (EMD, CPM, OME) |
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