Paper Abstract and Keywords |
Presentation |
2007-06-07 16:20
Workfunction Tuning of B Doped Fully-Silicided Pd2Si Gate Hiroyuki Shiraishi, Takuji Hosoi, Akio Ohta, Seiichi Miyazaki, Kentaro Shibahara (Hiroshima Univ.) SDM2007-37 Link to ES Tech. Rep. Archives: SDM2007-37 |
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Reference Info. |
IEICE Tech. Rep., vol. 107, no. 85, SDM2007-37, pp. 33-36, June 2007. |
Paper # |
SDM2007-37 |
Date of Issue |
2007-05-31 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SDM2007-37 Link to ES Tech. Rep. Archives: SDM2007-37 |
Conference Information |
Committee |
SDM |
Conference Date |
2007-06-07 - 2007-06-08 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Hiroshima Univ. ( Faculty Club) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Sci. & Technol. for Thin Dielectrics for MIS Devices |
Paper Information |
Registration To |
SDM |
Conference Code |
2007-06-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Workfunction Tuning of B Doped Fully-Silicided Pd2Si Gate |
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1st Author's Name |
Hiroyuki Shiraishi |
1st Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
2nd Author's Name |
Takuji Hosoi |
2nd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
3rd Author's Name |
Akio Ohta |
3rd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
4th Author's Name |
Seiichi Miyazaki |
4th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
5th Author's Name |
Kentaro Shibahara |
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Hiroshima University (Hiroshima Univ.) |
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Speaker |
Author-1 |
Date Time |
2007-06-07 16:20:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
SDM2007-37 |
Volume (vol) |
vol.107 |
Number (no) |
no.85 |
Page |
pp.33-36 |
#Pages |
4 |
Date of Issue |
2007-05-31 (SDM) |