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| Presentation | 2007-05-25 15:15 Development of On-Chip Integrated Micro Magnetic Field Probe Shota Koya, Hideki Torizuka, Masahiro Yamaguchi (Tohoku Univ.), Satoshi Aoyama, Shoji Kawahito (Shizuoka Univ.)  EMCJ2007-15 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The development of high-frequency and high-spatial-resolution magnetic field probe to solve the problem of Electromagnetic Interference is strongly hoped. It is thought that an miniaturized coil will obtain enough output if it is combined with the integrated amplifier by using the Si multilayer wiring substrate, and as a result, the spatial resolution of the probe can be improved. However, the problems are expected that wiring resistance is high or magnetic flux transmits the wiring layers, because metal wiring layers are very thin. Then, almost enough performances were confirmed after the shielded loop type integrated micro magnetic field probe was developed with the general-purpose chip service and the characteristics were evaluated. The author showed the possibility of development of a magnetic field probe that has high spatial resolution of several um order if it is combined with the integrated amplifier. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 68, EMCJ2007-15, pp. 29-34, May 2007. | |
| Paper # | EMCJ2007-15 | |
| Date of Issue | 2007-05-18 (EMCJ) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EMCJ2007-15 |
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| Conference Information | |
| Committee | EMCJ |
| Conference Date | 2007-05-25 - 2007-05-25 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niigata University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | EMCJ |
| Conference Code | 2007-05-EMCJ |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of On-Chip Integrated Micro Magnetic Field Probe |
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| 1st Author's Name | Shota Koya |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Hideki Torizuka |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Masahiro Yamaguchi |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Satoshi Aoyama |
| 4th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name | Shoji Kawahito |
| 5th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
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| Speaker | Author-2 |
| Date Time | 2007-05-25 15:15:00 |
| Presentation Time | 25 minutes |
| Registration for | EMCJ |
| Paper # | EMCJ2007-15 |
| Volume (vol) | vol.107 |
| Number (no) | no.68 |
| Page | pp.29-34 |
| #Pages | 6 |
| Date of Issue | 2007-05-18 (EMCJ) |
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