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| Presentation | 2007-05-21 14:45 SR Direct Etching of PTFE and Fabrication of Millimeter-Wave PTFE Waveguide -- Utilizing Beam Line, BL2 of 1.5 GeV Synchrotron Facility "New SUBARU" -- Mitsuyoshi Kishihara (Okayama Pref. Univ.), Yoshiaki Ukita, Sigeaki Yamamoto, Yuichi Utsumi, Isao Ohta (Univ. of Hyogo)  MW2007-15 Link to ES Tech. Rep. Archives: MW2007-15 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Microdevices have recently been developed by various micromachining technologies such as laser cutting, lithography, etc. PTFE is widely used as a microwave and millimeter-wave material. However, it is known that PTFE is too difficult to cut with high precision by conventional machining, or even by laser cutting or electrical discharge machining. It has been reported that PTFE microstructures can be fabricated by direct exposure to synchrotron radiation. In this paper, the SR direct etching of PTFE is introduced and a trial fabrication of millimeter-wave PTFE waveguide by sputter deposition of metal is attempted. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Millimeter-wave / Waveguide / SR etching / Waveguide bend / Microdevice / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 49, MW2007-15, pp. 17-22, May 2007. | |
| Paper # | MW2007-15 | |
| Date of Issue | 2007-05-14 (MW) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | MW2007-15 Link to ES Tech. Rep. Archives: MW2007-15 |
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| Conference Information | |
| Committee | MW |
| Conference Date | 2007-05-21 - 2007-05-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | University of Hyogo |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Microwave Technologies |
| Paper Information | |
| Registration To | MW |
| Conference Code | 2007-05-MW |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SR Direct Etching of PTFE and Fabrication of Millimeter-Wave PTFE Waveguide |
| Sub Title (in English) | Utilizing Beam Line, BL2 of 1.5 GeV Synchrotron Facility "New SUBARU" |
| Keyword(1) | Millimeter-wave |
| Keyword(2) | Waveguide |
| Keyword(3) | SR etching |
| Keyword(4) | Waveguide bend |
| Keyword(5) | Microdevice |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Mitsuyoshi Kishihara |
| 1st Author's Affiliation | Okayama Prefectural University (Okayama Pref. Univ.) |
| 2nd Author's Name | Yoshiaki Ukita |
| 2nd Author's Affiliation | University of Hyogo (Univ. of Hyogo) |
| 3rd Author's Name | Sigeaki Yamamoto |
| 3rd Author's Affiliation | University of Hyogo (Univ. of Hyogo) |
| 4th Author's Name | Yuichi Utsumi |
| 4th Author's Affiliation | University of Hyogo (Univ. of Hyogo) |
| 5th Author's Name | Isao Ohta |
| 5th Author's Affiliation | University of Hyogo (Univ. of Hyogo) |
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| Speaker | Author-1 |
| Date Time | 2007-05-21 14:45:00 |
| Presentation Time | 25 minutes |
| Registration for | MW |
| Paper # | MW2007-15 |
| Volume (vol) | vol.107 |
| Number (no) | no.49 |
| Page | pp.17-22 |
| #Pages | 6 |
| Date of Issue | 2007-05-14 (MW) |
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