Paper Abstract and Keywords |
Presentation |
2006-11-10 10:50
Growth delay time on fabricating thin ZrO2 film by limited reaction sputtering Hidetaka Sugiyama, Nobuo Kojima, Taro Yamagishi, Zhou Ying, Kimihiro Sasaki (Kanazawa Univ.) Link to ES Tech. Rep. Archives: CPM2006-126 |
Abstract |
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(See Japanese page) |
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Reference Info. |
IEICE Tech. Rep., vol. 106, no. 336, CPM2006-126, pp. 75-79, Nov. 2006. |
Paper # |
CPM2006-126 |
Date of Issue |
2006-11-02 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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Link to ES Tech. Rep. Archives: CPM2006-126 |
Conference Information |
Committee |
CPM |
Conference Date |
2006-11-09 - 2006-11-10 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kanazawa Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Process of Thin Film formation and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2006-11-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Growth delay time on fabricating thin ZrO2 film by limited reaction sputtering |
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1st Author's Name |
Hidetaka Sugiyama |
1st Author's Affiliation |
Kanazawa University (Kanazawa Univ.) |
2nd Author's Name |
Nobuo Kojima |
2nd Author's Affiliation |
Kanazawa University (Kanazawa Univ.) |
3rd Author's Name |
Taro Yamagishi |
3rd Author's Affiliation |
Kanazawa University (Kanazawa Univ.) |
4th Author's Name |
Zhou Ying |
4th Author's Affiliation |
Kanazawa University (Kanazawa Univ.) |
5th Author's Name |
Kimihiro Sasaki |
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Kanazawa University (Kanazawa Univ.) |
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Speaker |
Author-1 |
Date Time |
2006-11-10 10:50:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2006-126 |
Volume (vol) |
vol.106 |
Number (no) |
no.336 |
Page |
pp.75-79 |
#Pages |
5 |
Date of Issue |
2006-11-02 (CPM) |
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