Paper Abstract and Keywords |
Presentation |
2006-11-09 17:00
Barrier properties of HfNx thin films prepared by hot wire method between Cu interconnects and SiO2 or SiOC layer Masaru Sato, Mayumi B. Takeyama, Atsushi Noya (Kitami Inst. of Technol.) Link to ES Tech. Rep. Archives: CPM2006-121 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 106, no. 336, CPM2006-121, pp. 47-52, Nov. 2006. |
Paper # |
CPM2006-121 |
Date of Issue |
2006-11-02 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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Link to ES Tech. Rep. Archives: CPM2006-121 |
Conference Information |
Committee |
CPM |
Conference Date |
2006-11-09 - 2006-11-10 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kanazawa Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Process of Thin Film formation and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2006-11-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
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Title (in English) |
Barrier properties of HfNx thin films prepared by hot wire method between Cu interconnects and SiO2 or SiOC layer |
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1st Author's Name |
Masaru Sato |
1st Author's Affiliation |
Kitami-Institute of Technology (Kitami Inst. of Technol.) |
2nd Author's Name |
Mayumi B. Takeyama |
2nd Author's Affiliation |
Kitami-Institute of Technology (Kitami Inst. of Technol.) |
3rd Author's Name |
Atsushi Noya |
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Kitami-Institute of Technology (Kitami Inst. of Technol.) |
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Speaker |
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Date Time |
2006-11-09 17:00:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2006-121 |
Volume (vol) |
vol.106 |
Number (no) |
no.336 |
Page |
pp.47-52 |
#Pages |
6 |
Date of Issue |
2006-11-02 (CPM) |