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Paper Abstract and Keywords
Presentation 2006-11-09 13:30
Prepration of AZO thin films by sputtering method
Ayumu Kawakami, Toru Noguchi, Akiyuki Higashide, Shinsuke Miyazaki, Hidehiko Shimizu, Takeo Maruyama, Haruo Iwano, Takahiro Kawakami (Niigata Univ.), Yoichi Hoshi (T.P.U.) Link to ES Tech. Rep. Archives: CPM2006-113
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 106, no. 336, CPM2006-113, pp. 1-5, Nov. 2006.
Paper # CPM2006-113 
Date of Issue 2006-11-02 (CPM) 
ISSN Print edition: ISSN 0913-5685
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee CPM  
Conference Date 2006-11-09 - 2006-11-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Kanazawa Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process of Thin Film formation and Materials, etc. 
Paper Information
Registration To CPM 
Conference Code 2006-11-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Prepration of AZO thin films by sputtering method 
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1st Author's Name Ayumu Kawakami  
1st Author's Affiliation Niigata University (Niigata Univ.)
2nd Author's Name Toru Noguchi  
2nd Author's Affiliation Niigata University (Niigata Univ.)
3rd Author's Name Akiyuki Higashide  
3rd Author's Affiliation Niigata University (Niigata Univ.)
4th Author's Name Shinsuke Miyazaki  
4th Author's Affiliation Niigata University (Niigata Univ.)
5th Author's Name Hidehiko Shimizu  
5th Author's Affiliation Niigata University (Niigata Univ.)
6th Author's Name Takeo Maruyama  
6th Author's Affiliation Niigata University (Niigata Univ.)
7th Author's Name Haruo Iwano  
7th Author's Affiliation Niigata University (Niigata Univ.)
8th Author's Name Takahiro Kawakami  
8th Author's Affiliation Niigata University (Niigata Univ.)
9th Author's Name Yoichi Hoshi  
9th Author's Affiliation Tokyo Polytechnics (T.P.U.)
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Speaker Author-1 
Date Time 2006-11-09 13:30:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2006-113 
Volume (vol) vol.106 
Number (no) no.336 
Page pp.1-5 
#Pages
Date of Issue 2006-11-02 (CPM) 


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