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Paper Abstract and Keywords
Presentation 2006-08-24 13:25
Fabrication of Blazed Gratings by SR Exposure System
Tomohiko Kanie, Makoto Katayama (SEI), Teppei Morita, Noboru Toshima, Junichi Kato (Nakanuma ASC), Tomio Nagayama, Yasushi Mizutani (KMIR), Fumiki Kato, Shinya Fujinawa, Susumu Sugiyama (Rits) OFT2006-17
Abstract (in Japanese) (See Japanese page) 
(in English) We have successively fabricated a blazed nano grating based on the X-ray gray-scale lithography technology.
The structure of PMMA resist were included triangle shapes by exposing a synchrotron radiation to a moving PMMA resist.
But the shape of the oblique side was not linearity and the vertical side had a small slop because of the influence of the Fresnel
diffraction. The modulation depth of blazed grating is enabled to control by the deposited doses of X-ray.
Keyword (in Japanese) (See Japanese page) 
(in English) X-ray lithography / blazed grating / synchrotron radiation / Fresnel diffraction / / / /  
Reference Info. IEICE Tech. Rep., vol. 106, no. 211, OFT2006-17, pp. 7-9, Aug. 2006.
Paper # OFT2006-17 
Date of Issue 2006-08-17 (OFT) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee OCS OFT  
Conference Date 2006-08-24 - 2006-08-25 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OFT 
Conference Code 2006-08-OCS-OFT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Blazed Gratings by SR Exposure System 
Sub Title (in English)  
Keyword(1) X-ray lithography  
Keyword(2) blazed grating  
Keyword(3) synchrotron radiation  
Keyword(4) Fresnel diffraction  
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Keyword(6)  
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1st Author's Name Tomohiko Kanie  
1st Author's Affiliation Sumitomo Electric Industries, Ltd. (SEI)
2nd Author's Name Makoto Katayama  
2nd Author's Affiliation Sumitomo Electric Industries, Ltd. (SEI)
3rd Author's Name Teppei Morita  
3rd Author's Affiliation Nakanuma Art Screen Co, Ltd. (Nakanuma ASC)
4th Author's Name Noboru Toshima  
4th Author's Affiliation Nakanuma Art Screen Co, Ltd. (Nakanuma ASC)
5th Author's Name Junichi Kato  
5th Author's Affiliation Nakanuma Art Screen Co, Ltd. (Nakanuma ASC)
6th Author's Name Tomio Nagayama  
6th Author's Affiliation Kyoto Municipal Industrial Research Institute (KMIR)
7th Author's Name Yasushi Mizutani  
7th Author's Affiliation Kyoto Municipal Industrial Research Institute (KMIR)
8th Author's Name Fumiki Kato  
8th Author's Affiliation Ritsumeikan University (Rits)
9th Author's Name Shinya Fujinawa  
9th Author's Affiliation Ritsumeikan University (Rits)
10th Author's Name Susumu Sugiyama  
10th Author's Affiliation Ritsumeikan University (Rits)
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Speaker Author-1 
Date Time 2006-08-24 13:25:00 
Presentation Time 25 minutes 
Registration for OFT 
Paper # OFT2006-17 
Volume (vol) vol.106 
Number (no) no.211 
Page pp.7-9 
#Pages
Date of Issue 2006-08-17 (OFT) 


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