Paper Abstract and Keywords |
Presentation |
2006-08-24 13:25
Fabrication of Blazed Gratings by SR Exposure System Tomohiko Kanie, Makoto Katayama (SEI), Teppei Morita, Noboru Toshima, Junichi Kato (Nakanuma ASC), Tomio Nagayama, Yasushi Mizutani (KMIR), Fumiki Kato, Shinya Fujinawa, Susumu Sugiyama (Rits) OFT2006-17 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have successively fabricated a blazed nano grating based on the X-ray gray-scale lithography technology.
The structure of PMMA resist were included triangle shapes by exposing a synchrotron radiation to a moving PMMA resist.
But the shape of the oblique side was not linearity and the vertical side had a small slop because of the influence of the Fresnel
diffraction. The modulation depth of blazed grating is enabled to control by the deposited doses of X-ray. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
X-ray lithography / blazed grating / synchrotron radiation / Fresnel diffraction / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 106, no. 211, OFT2006-17, pp. 7-9, Aug. 2006. |
Paper # |
OFT2006-17 |
Date of Issue |
2006-08-17 (OFT) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
OFT2006-17 |
|