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Paper Abstract and Keywords
Presentation 2006-08-18 09:25
Experimental Study on Breakdown of Mobility Universality in (110)-oriented <100>-directed pMOSFETs
Ken Shimizu, Takuya Saraya, Toshiro Hiramoto (Univ. of Tokyo) Link to ES Tech. Rep. Archives: SDM2006-143 ICD2006-97
Abstract (in Japanese) (See Japanese page) 
(in English) (110)-oriented pMOSFET is a promising choice for future CMOS device. However, physical origin of breakdown on mobility universality is still unknown. This paper describes experimental determination of the value of &#61544; by changing SOI thickness and temperature. It is found that in the case of <100>-directed channel on (110)-oriented pMOSFETs, &#61544; should be larger than unity, which implies the collapse of mobility universality, when temperature is low or SOI thickness is ultimately thin. The possible origin of universality breakdown is due to direction-dependent scattering mechanisms.
Keyword (in Japanese) (See Japanese page) 
(in English) (110)-oriented pMSOFET / mobility / mobility universality / Ultrathin body SOI MOSFET / / / /  
Reference Info. IEICE Tech. Rep., vol. 106, no. 206, SDM2006-143, pp. 105-109, Aug. 2006.
Paper # SDM2006-143 
Date of Issue 2006-08-10 (SDM, ICD) 
ISSN Print edition: ISSN 0913-5685
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Conference Information
Committee ICD SDM  
Conference Date 2006-08-17 - 2006-08-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido University 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2006-08-ICD-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Experimental Study on Breakdown of Mobility Universality in (110)-oriented <100>-directed pMOSFETs 
Sub Title (in English)  
Keyword(1) (110)-oriented pMSOFET  
Keyword(2) mobility  
Keyword(3) mobility universality  
Keyword(4) Ultrathin body SOI MOSFET  
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1st Author's Name Ken Shimizu  
1st Author's Affiliation University of Tokyo (Univ. of Tokyo)
2nd Author's Name Takuya Saraya  
2nd Author's Affiliation University of Tokyo (Univ. of Tokyo)
3rd Author's Name Toshiro Hiramoto  
3rd Author's Affiliation University of Tokyo (Univ. of Tokyo)
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Speaker Author-1 
Date Time 2006-08-18 09:25:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2006-143, ICD2006-97 
Volume (vol) vol.106 
Number (no) no.206(SDM), no.207(ICD) 
Page pp.105-109 
#Pages
Date of Issue 2006-08-10 (SDM, ICD) 


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