| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2006-06-21 14:55 Characterization of open volumes in high-k gate dielectrics by using monoenergetic positron beams Akira Uedono, T. Otsuka, K. Ito, K. Shiraishi, Kikuo Yamabe (Univ. of Tsukuba), Seiichi Miyazaki (Hiroshima Univ.), Naoto Umezawa, Toyohiro Chikyow (NIMS), Toshiyuki Ohdaira, R. Suzuki (AIST), Seiji Inumiya, Satoshi Kamiyama (Selete), Yasushi Akasaka (TEL), Yasuo Nara (Selete), Keisaku Yamada (Waseda Uni.) Link to ES Tech. Rep. Archives:  SDM2006-46 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 106, no. 108, SDM2006-46, pp. 25-30, June 2006. | |
| Paper # | SDM2006-46 | |
| Date of Issue | 2006-06-14 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | Link to ES Tech. Rep. Archives: SDM2006-46 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2006-06-21 - 2006-06-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Faculty Club, Hiroshima Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Science and Technologies of Dielectric Thin Films for Future Electron Devices |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2006-06-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of open volumes in high-k gate dielectrics by using monoenergetic positron beams |
| Sub Title (in English) | |
| Keyword(1) | |
| Keyword(2) | |
| Keyword(3) | |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Akira Uedono |
| 1st Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 2nd Author's Name | T. Otsuka |
| 2nd Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 3rd Author's Name | K. Ito |
| 3rd Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 4th Author's Name | K. Shiraishi |
| 4th Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 5th Author's Name | Kikuo Yamabe |
| 5th Author's Affiliation | University of Tsukuba (Univ. of Tsukuba) |
| 6th Author's Name | Seiichi Miyazaki |
| 6th Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 7th Author's Name | Naoto Umezawa |
| 7th Author's Affiliation | NIMS (NIMS) |
| 8th Author's Name | Toyohiro Chikyow |
| 8th Author's Affiliation | NIMS (NIMS) |
| 9th Author's Name | Toshiyuki Ohdaira |
| 9th Author's Affiliation | AIST (AIST) |
| 10th Author's Name | R. Suzuki |
| 10th Author's Affiliation | AIST (AIST) |
| 11th Author's Name | Seiji Inumiya |
| 11th Author's Affiliation | Selete (Selete) |
| 12th Author's Name | Satoshi Kamiyama |
| 12th Author's Affiliation | Selete (Selete) |
| 13th Author's Name | Yasushi Akasaka |
| 13th Author's Affiliation | Tokyo Electron Limited (TEL) |
| 14th Author's Name | Yasuo Nara |
| 14th Author's Affiliation | Selete (Selete) |
| 15th Author's Name | Keisaku Yamada |
| 15th Author's Affiliation | Waseda University (Waseda Uni.) |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2006-06-21 14:55:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2006-46 |
| Volume (vol) | vol.106 |
| Number (no) | no.108 |
| Page | pp.25-30 |
| #Pages | 6 |
| Date of Issue | 2006-06-14 (SDM) |
[Return to Top Page]