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Paper Abstract and Keywords
Presentation 2006-06-02 09:35
Hybrid System for Measuring Surface Undulation by Means of Reflection Method and Image Method
Tomotaka Kouzuki, Qin Shu (Univ. of Fukui), Yasunori Touma (Hokkei), Hiroshi Suga (Hiroshima International Univ.), Kazuhiko Ishikawa (Fukui Nat. Col. of Tech.), Tetsuma Sakurai (Univ. of Fukui), Masahiro Ueda (University of Fukui) Link to ES Tech. Rep. Archives: LQE2006-1
Abstract (in Japanese) (See Japanese page) 
(in English) A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1 nm with a measurement frequency of 24 Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100 Hz.
Keyword (in Japanese) (See Japanese page) 
(in English) Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering / / /  
Reference Info. IEICE Tech. Rep., vol. 106, no. 90, LQE2006-1, pp. 1-6, June 2006.
Paper # LQE2006-1 
Date of Issue 2006-05-26 (LQE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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Conference Information
Committee LQE  
Conference Date 2006-06-02 - 2006-06-02 
Place (in Japanese) (See Japanese page) 
Place (in English) University of Fukui 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Quantum Optics, Non-linear Optics, Ultra-high Speed Phenomenon, Laser Physics 
Paper Information
Registration To LQE 
Conference Code 2006-06-LQE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Hybrid System for Measuring Surface Undulation by Means of Reflection Method and Image Method 
Sub Title (in English)  
Keyword(1) Real-time measurement  
Keyword(2) Surface undulation  
Keyword(3) Surface roughness  
Keyword(4) Laser reflection  
Keyword(5) Laser scattering  
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1st Author's Name Tomotaka Kouzuki  
1st Author's Affiliation University of Fukui (Univ. of Fukui)
2nd Author's Name Qin Shu  
2nd Author's Affiliation University of Fukui (Univ. of Fukui)
3rd Author's Name Yasunori Touma  
3rd Author's Affiliation Hokkei Industries Co. Ltd. (Hokkei)
4th Author's Name Hiroshi Suga  
4th Author's Affiliation Hiroshima International University (Hiroshima International Univ.)
5th Author's Name Kazuhiko Ishikawa  
5th Author's Affiliation Fukui National College of Technology (Fukui Nat. Col. of Tech.)
6th Author's Name Tetsuma Sakurai  
6th Author's Affiliation University of Fukui (Univ. of Fukui)
7th Author's Name Masahiro Ueda  
7th Author's Affiliation University of Fukui (University of Fukui)
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Speaker
Date Time 2006-06-02 09:35:00 
Presentation Time 25 
Registration for LQE 
Paper # IEICE-LQE2006-1 
Volume (vol) IEICE-106 
Number (no) no.90 
Page pp.1-6 
#Pages IEICE-6 
Date of Issue IEICE-LQE-2006-05-26 


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