Paper Abstract and Keywords |
Presentation |
2006-06-02 09:35
Hybrid System for Measuring Surface Undulation by Means of Reflection Method and Image Method Tomotaka Kouzuki, Qin Shu (Univ. of Fukui), Yasunori Touma (Hokkei), Hiroshi Suga (Hiroshima International Univ.), Kazuhiko Ishikawa (Fukui Nat. Col. of Tech.), Tetsuma Sakurai (Univ. of Fukui), Masahiro Ueda (University of Fukui) Link to ES Tech. Rep. Archives: LQE2006-1 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1 nm with a measurement frequency of 24 Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100 Hz. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering / / / |
Reference Info. |
IEICE Tech. Rep., vol. 106, no. 90, LQE2006-1, pp. 1-6, June 2006. |
Paper # |
LQE2006-1 |
Date of Issue |
2006-05-26 (LQE) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
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