IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2005-11-12 13:00
Preparation and examination of ITO thin film for organic electroluminescence device
Kouichi Tsukio, Masaki Takeuchi, Kazuya Morishita, Hidehiko Shimizu, Takeo Maruyama, Takahiro Kawakami (Niigata Univ.), Yoichi Hoshi (Tokyo Polytechnic Univ.) Link to ES Tech. Rep. Archives: CPM2005-170
Abstract (in Japanese) (See Japanese page) 
(in English) In order to examine deposition method of the ITO films for transparent organic light emitting diode (OLED) at the low-temperature, the ITO films was prepared by RF-DC coupled magnetron sputtering (RF-DC MS) method. As a result, ITO films deposited by the RF-DC MS method obtained at temperature below 50℃. ITO films deposited by the RF-DC MS method were amorphous and those films had surface roughness (Ra) below 1nm, work function of about 4.8eV and resistivity of 5×10-4Ω・cm. Compared with the luminescence and electrical characteristic of an OLED used nesa glass, the OLED used the ITO film deposited by RF-DC MS method had poor luminescence and electrical characteristic. However, luminescence was able to be observed from the OLED which used the ITO film deposited by RF-DC MS method.
Keyword (in Japanese) (See Japanese page) 
(in English) ITO thin film / RF-DC coupled magnetron sputtering method / low temperature deposition / amorphous / organic light emitting diodes (OLEDs) / / /  
Reference Info. IEICE Tech. Rep., vol. 105, no. 394, CPM2005-170, pp. 43-48, Nov. 2005.
Paper # CPM2005-170 
Date of Issue 2005-11-05 (CPM) 
ISSN Print edition: ISSN 0913-5685
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF Link to ES Tech. Rep. Archives: CPM2005-170

Conference Information
Committee CPM  
Conference Date 2005-11-11 - 2005-11-12 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2005-11-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation and examination of ITO thin film for organic electroluminescence device 
Sub Title (in English)  
Keyword(1) ITO thin film  
Keyword(2) RF-DC coupled magnetron sputtering method  
Keyword(3) low temperature deposition  
Keyword(4) amorphous  
Keyword(5) organic light emitting diodes (OLEDs)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Kouichi Tsukio  
1st Author's Affiliation Niigata University (Niigata Univ.)
2nd Author's Name Masaki Takeuchi  
2nd Author's Affiliation Niigata University (Niigata Univ.)
3rd Author's Name Kazuya Morishita  
3rd Author's Affiliation Niigata University (Niigata Univ.)
4th Author's Name Hidehiko Shimizu  
4th Author's Affiliation Niigata University (Niigata Univ.)
5th Author's Name Takeo Maruyama  
5th Author's Affiliation Niigata University (Niigata Univ.)
6th Author's Name Takahiro Kawakami  
6th Author's Affiliation Niigata University (Niigata Univ.)
7th Author's Name Yoichi Hoshi  
7th Author's Affiliation Tokyo Polytechnic University (Tokyo Polytechnic Univ.)
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker Author-1 
Date Time 2005-11-12 13:00:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2005-170 
Volume (vol) vol.105 
Number (no) no.394 
Page pp.43-48 
#Pages
Date of Issue 2005-11-05 (CPM) 


[Return to Top Page]

[Return to IEICE Web Page]


The Institute of Electronics, Information and Communication Engineers (IEICE), Japan