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Paper Abstract and Keywords
Presentation 2005-07-14 16:10
Interface Electronics for MEMS Vibratory Sensors
Kazusuke Maenaka, Nobuhiro Sawai, Takayuki Fujita, Yoichiro Takayama (Univ. of Hyogo) Link to ES Tech. Rep. Archives: ICD2005-52
Abstract (in Japanese) (See Japanese page) 
(in English) A MEMS vibratory acceleration sensor,vibratory gyroscope and their interface circuitry are discussed. Vibratory type sensors are preferable for improvement of resolution and stability because their outputs are digital (frequency) or synchronized with a reference signal.From view point of high resolution system,we designed analog-digital mixed circuits for the vibratory accelerometer and gyroscope.The circuits contain overtone VCO in PLL,whose output acts as control clocks for filters, compensators, switches,etc.We show that the devices and circuitry are operating properly and further consideration of VCO circuits is required for more accurate system.
Keyword (in Japanese) (See Japanese page) 
(in English) MEMS / Vibratory sensor / Acceleration sensor / Angular rate sensor / gyroscope / PLD / PLL /  
Reference Info. IEICE Tech. Rep., vol. 105, no. 184, ICD2005-52, pp. 71-76, July 2005.
Paper # ICD2005-52 
Date of Issue 2005-07-07 (ICD) 
ISSN Print edition: ISSN 0913-5685
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Conference Information
Committee ICD  
Conference Date 2005-07-14 - 2005-07-15 
Place (in Japanese) (See Japanese page) 
Place (in English) Toyohashi Univ. of Tech. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) LSIs for analog, digital-analog mixed signal processing, sensors, and communication, etc. 
Paper Information
Registration To ICD 
Conference Code 2005-07-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Interface Electronics for MEMS Vibratory Sensors 
Sub Title (in English)  
Keyword(1) MEMS  
Keyword(2) Vibratory sensor  
Keyword(3) Acceleration sensor  
Keyword(4) Angular rate sensor  
Keyword(5) gyroscope  
Keyword(6) PLD  
Keyword(7) PLL  
Keyword(8)  
1st Author's Name Kazusuke Maenaka  
1st Author's Affiliation University of Hyogo (Univ. of Hyogo)
2nd Author's Name Nobuhiro Sawai  
2nd Author's Affiliation University of Hyogo (Univ. of Hyogo)
3rd Author's Name Takayuki Fujita  
3rd Author's Affiliation University of Hyogo (Univ. of Hyogo)
4th Author's Name Yoichiro Takayama  
4th Author's Affiliation University of Hyogo (Univ. of Hyogo)
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Speaker Author-1 
Date Time 2005-07-14 16:10:00 
Presentation Time 25 minutes 
Registration for ICD 
Paper # ICD2005-52 
Volume (vol) vol.105 
Number (no) no.184 
Page pp.71-76 
#Pages
Date of Issue 2005-07-07 (ICD) 


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