Paper Abstract and Keywords |
Presentation |
2005-01-27 13:30
Evaluation of LVP observability in 90nm devices, and development of on-chip elements for LVP measurement Junpei Nonaka, Shinichi Wada (NEC Electronics) Link to ES Tech. Rep. Archives: CPM2004-156 ICD2004-201 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
For devices after 90nm generation, LVP measurement will be difficult, because transistor sizes are less than laser diffraction limited. In this study, we evaluated ease of LVP measurement for 90nm devices. We also considered relationship between voltage waveforms and LVP waveforms through LVP measurement and device simulation. For devices after 90nm, inserting on-chip elements for LVP measurement into circuit will ease LVP measurement. We propose a new element structure to ease LVP measurement, and evaluate it. As a result, LVP waveform amplitudes for the elements are 30-50% larger than those for the same size inverters. Ease of LVP measurement is improved by using the proposed structure. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
LVP / deep submicron / device simulation / observability / pad / / / |
Reference Info. |
IEICE Tech. Rep., vol. 104, no. 628, ICD2004-201, pp. 7-12, Jan. 2005. |
Paper # |
ICD2004-201 |
Date of Issue |
2005-01-20 (CPM, ICD) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
Link to ES Tech. Rep. Archives: CPM2004-156 ICD2004-201 |
Conference Information |
Committee |
ICD CPM |
Conference Date |
2005-01-27 - 2005-01-28 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
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(See Japanese page) |
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Paper Information |
Registration To |
ICD |
Conference Code |
2005-01-ICD-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Evaluation of LVP observability in 90nm devices, and development of on-chip elements for LVP measurement |
Sub Title (in English) |
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LVP |
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deep submicron |
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device simulation |
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observability |
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pad |
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1st Author's Name |
Junpei Nonaka |
1st Author's Affiliation |
NEC Electronics Corporation (NEC Electronics) |
2nd Author's Name |
Shinichi Wada |
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NEC Electronics Corporation (NEC Electronics) |
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Speaker |
Author-1 |
Date Time |
2005-01-27 13:30:00 |
Presentation Time |
30 minutes |
Registration for |
ICD |
Paper # |
CPM2004-156, ICD2004-201 |
Volume (vol) |
vol.104 |
Number (no) |
no.626(CPM), no.628(ICD) |
Page |
pp.7-12 |
#Pages |
6 |
Date of Issue |
2005-01-20 (CPM, ICD) |
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