One-Dimensional Spatial Light Modulator of Electrooptic Bragg Deflection Type Using Periodically Poled MgO:LiNbO3 |
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Toshiyuki Inoue , Toshiaki Suhara |
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 Toshiyuki Inoue |
 Toshiaki Suhara |
Both the configuration and the design of the electro-optic Bragg deflection type one-dimensional spatial light modulator are presented, and the requirements of pixel electrode size, gap width and grating period for realizing high pixel density are considered. It is found that the pixel interval can be decreased and high pixel density can be realized when the domain-inversion period is appropriately determined. The fabrication methods for MgO doped LiNbO3 periodically poled structures and for the modulator are shown and the characteristics of the fundamental unit of the modulator (1 pixel) are evaluated. The relaxation phenomena occur to an extreme degree during modulation of violet laser light. It is found that annealing the device in an O2 atmosphere at 600°C for 2 hours is an effective way to reduce the relaxation. Maximum diffraction efficiency of 97% is accomplished; this is very close to the theoretical value of 100%. The light intensity modulation of ultra-violet laser light is demonstrated for the first time. A prototype of the one-dimensional spatial light modulator is fabricated and the light intensity pattern of the diffracted light is successfully generated.
In this paper, the design, fabrication methods and characteristics of a one-dimensional spatial light modulator of electro-optic Bragg deflection type using periodically poled MgO doped LiNbO3 are presented in considerable detail. Moreover, excellent results which indicate potential for application to future displays and lithography systems have been obtained. For the above reasons, this paper is a worthy candidate for the Best Paper Award.
